Abstract: Disclosed is an organometallic precursor for forming a metal pattern, having a structure defined by the following Formula 1, and a method of forming the metal pattern using the same, in which the conductive metal pattern is readily formed through an exposing step without using a photo-resist.
Type:
Grant
Filed:
September 11, 2002
Date of Patent:
July 29, 2003
Assignee:
Samsung Eleectronics Co., Ltd.
Inventors:
Min Chul Chung, Soon Taik Hwang, Young Hun Byun, Euk Che Hwang