Abstract: Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.

Abstract: Methods and apparatus for tuning devices having resonators are described. Phase shifters are included in the circuits and used to shift the phase of the output signal(s) of the resonators. In some implementations, the phase shifters are configured in a feedback loop with the resonators. One or more of the apparatus described herein may be implemented as part, or all, of a microelectromechanical system (MEMS).

Abstract: Methods and apparatus for tuning devices having mechanical resonators are described. In one implementation, a mechanical resonator and a phase shifter are configured in a feedback loop, so that the phase shifter shifts the phase of the resonator output signal. The amount of phase shift induced by the phase shifter may be variable. In another implementation, an LC tuning subcircuit is coupled to a mechanical resonator. In some implementations, the LC tuning subcircuit has a variable capacitance. One or more of the apparatus described herein may be implemented as part, or all, of a microelectromechanical system (MEMS).

Abstract: Methods and apparatus for tuning devices having mechanical resonators are described. In one implementation, a mechanical resonator and a phase shifter are configured in a feedback loop, so that the phase shifter shifts the phase of the resonator output signal. The amount of phase shift induced by the phase shifter may be variable. In another implementation, an LC tuning subcircuit is coupled to a mechanical resonator. In some implementations, the LC tuning subcircuit has a variable capacitance. One or more of the apparatus described herein may be implemented as part, or all, of a microelectromechanical system (MEMS).

Abstract: Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.

Abstract: Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.

Abstract: Multi-port devices having multiple electrical ports are described, as are related methods. Some of the multi-port devices may have two input ports and two output ports, and may be driven differentially, in a single-ended mode, in a single-ended to differential mode, or in a differential to single-ended mode. The multi-port devices may include one or more transducers coupled to the electrical ports.

Abstract: Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.

Abstract: Compensation of a signal using resonators as well as related methods and devices are described. Some embodiments include methods and devices for performing frequency compensation on a signal.