Patents Assigned to SARAMDLE CO., LTD.
  • Vacuum-pipe connecting member for detecting gas leak
    Patent number: 10001233
    Abstract: A vacuum pipe connecting member for detecting in real time a gas leak from a pipe connection between vacuum pipes is provided. In one aspect, the vacuum pipe connecting member is provided to include: a clamp for connecting a vacuum pipe to another vacuum pipe or to a semiconductor manufacturing apparatus; and a reactant that is provided in the clamp and is chemically reactive to a gas leaking from the pipe connection.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: June 19, 2018
    Assignee: SARAMDLE CO., LTD.
    Inventor: Jae Hak Lee