Abstract: An all-in-one digital cantilever controller applicable to all SFM systems is disclosed that can perform many relevant experiments for cantilever control in scanned force microscopy. A compact optimized digital implementation replaces analog components associated with cantilever signal processing and control. It has minimal thermal drift, at least an order of magnitude less than analog components. It has a number of meaningful tuning parameters available, as well as a user-friendly graphical interface (GUI) for adjusting those tuning parameters and performing different types of experiments.

Abstract: A method for constructing a suspension bridge in places where it is not feasible to construct permanent earth anchorages land at either or both ends of the suspension bridge span is disclosed. The method of constructing the self-anchored suspension bridge comprises the use of preexisting permanent structures solely or in combination with minimum temporary structures to provide temporary anchor points for main suspension cables during construction. Once the suspension bridge span end structures are properly secured by a tensioning cable to the temporary structure or by a temporary connection to a permanent structure and the deck segment of pier table is lifted into place and tied down on an end support, the main suspension bridge cables are erected, suspenders are then erected from the main cable, and further construction of the bridge proceeds.

Abstract: The invention provides a model-based control approach to chemical-mechanical planarization (CMP) control. The preferred embodiment comprises mathematical models of the CMP process. These models play a critical role in obtaining superior control performance. Model-based Control Design involves the construction of a dynamic mathematical model of the system to be controlled, e.g. a removal rate model of a CMP system. The model can then be evaluated via computer simulations, and validated using data from the system. The invention provides a method and apparatus that processes in-situ data from a suite of real-time sensors and produces real-time commands to multiple actuators, such as applied pressures, slurry-flow rate, and wafer/pad velocity. A key aspect of the invention is an integrated model-based pressure-temperature-velocity-slurry flow control system that includes many innovations in real-time mode identification, real-time gain estimation, and real-time control.