Abstract: A microelectromechanical system (MEMS) solar cell device. The MEMS solar cell device includes a substrate, a sensing membrane exposed to light radiation being spaced from the substrate, a collector electrode disposed between the substrate and the sensing membrane, and a cavity defined between the sensing membrane and the collector electrode. The collector electrode collects charge carriers generated by light radiation on the sensing membrane within the cavity. A solar module or panel may be provided including a plurality of the cells arranged in an array on a substrate.

Abstract: A method of producing an electromechanical device includes forming a layer of density-changing material on a substructure, and forming a support layer on at least a portion of the layer of density-changing material. The density-changing material has a first density during the forming the layer and a second density subsequent to the forming the support layer, the second density being greater than the first density such that the layer of density-changing material shrinks in at least one dimension to provide a gap between the layer of density changing material and at least one of the support layer and the substructure. A combined electronic and electromechanical device has a substrate, an electronic circuit formed on the substrate, and an electromechanical system formed on the substrate to provide a combined electronic and electromechanical device on a common substrate. The electromechanical system comprises a structure that is free to move within a gap defined by the electromechanical system.

Abstract: A resonant MEMS device that detects photons, particles and small forces including atomic forces is disclosed. The device comprises a planar substrate 1, two electrodes 2 and 3 on top of the substrate, a resonant micro-electromechanical (MEMS) structure 6, such as a cantilever, anchored to first electrode 2 and arranged above the second electrode 3 separated from this electrode with an ultrathin transition layer 5. The resonant MEMS structure is working at its natural resonant frequency. The resonant oscillation of the cantilever can be initiated by applying AC voltage with frequency equaling the resonant frequency of the MEMS structure. A constant voltage is applied between the cantilever and the second electrode. The cantilever oscillates at very small amplitude ranging from few ?ngstrom (?) to several nm. During operation, a constant component of the electrical current is measured between the cantilever and the second electrode 3.

Abstract: A resonant MEMS device that detects photons, particles and small forces including atomic forces is disclosed. The device comprises a planar substrate 1, two electrodes 2 and 3 on top of the substrate, a resonant micro-electromechanical (MEMS) structure 6, such as a cantilever, anchored to first electrode 2 and arranged above the second electrode 3 separated from this electrode with an ultrathin transition layer 5. The resonant MEMS structure is working at its natural resonant frequency. The resonant oscillation of the cantilever can be initiated by applying AC voltage with frequency equaling the resonant frequency of the MEMS structure. A constant voltage is applied between the cantilever and the second electrode. The cantilever oscillates at very small amplitude ranging from few ?ngstrom (?) to several nm. During operation, a constant component of the electrical current is measured between the cantilever and the second electrode 3.