Patents Assigned to ScatterMaster LLC
  • Hemispherical Scanning Optical Scatterometer
    Publication number: 20140362377
    Abstract: A hemispherical scanning optical scatterometer and method for its use for measuring scattered radiation, with a reflected scatter measurement laser, and/or a transmitted scatter measurement laser, an array of optical detectors, a computer controlled system to rotate the array of optical detectors, an electronic system, a computer interface and a computer for processing the signal.
    Type: Application
    Filed: May 30, 2014
    Publication date: December 11, 2014
    Applicant: ScatterMaster LLC
    Inventors: Eric Hegstrom, John Clyde Stover