Abstract: An apparatus for transporting silicon wafers in a horizontal transporting direction into a printing device has two transporting units, which each have a traversing device and a holding means thereon. At least two transporting units each with a holding means are provided, wherein the traversing devices of said units run next to each other along the transporting direction. The holding means are each formed and arranged in such a way that an unloaded holding means has space to pass by a holding means loaded with a silicon wafer. The traversing devices are rails and the holding means are carriages mounted thereon.
Type:
Application
Filed:
September 2, 2010
Publication date:
April 25, 2013
Applicant:
SCHMID TECHNOLOGY GMBH
Inventors:
Jurgen Sollner, Thomas Sauter, Jens Munkel, Christian Buchner