Patents Assigned to Schunk Kohlensteofftechnik GmbH
  • Carrier for receiving an object and method for the production of a carrier
    Patent number: 7919143
    Abstract: A carrier for an object, preferably a substrate of a semiconductor component such as a wafer, includes a receiving element for the object and gas outlets arranged below the receiving element along the object received. At least sections of the carrier are made of a material which including stabilizing fibers and having a porosity which forms the gas outlets, in order to enable a desired gas to exit from the gas outlets in a dosed and finely distributed manner.
    Type: Grant
    Filed: December 6, 2004
    Date of Patent: April 5, 2011
    Assignee: Schunk Kohlensteofftechnik GmbH
    Inventor: Stefan Schneweis
  • Carrier for receiving an object and method for the production of a carrier
    Publication number: 20070110975
    Abstract: A carrier for an object, preferably a substrate of a semiconductor component such as a wafer, includes a receiving element for the object and gas outlets arranged below the receiving element along the object received. At least sections of the carrier are made of a material which including stabilizing fibers and having a porosity which forms the gas outlets, in order to enable a desired gas to exit from the gas outlets in a dosed and finely distributed manner.
    Type: Application
    Filed: December 6, 2004
    Publication date: May 17, 2007
    Applicant: SCHUNK KOHLENSTEOFFTECHNIK GMBH
    Inventor: Stefan Schneweis