Patents Assigned to SCI ENGINEERED MATERIALS, INC.
  • High efficiency rotatable sputter target
    Patent number: 11830712
    Abstract: A rotatable sputtering target is provided for use in a sputtering system having a plurality of hollow sleeves of sputtering material arranged on a hollow e backing tube so as to form an annular space that is occupied by a bonding agent and a thermally conductive element which is a woven metal mesh.
    Type: Grant
    Filed: April 24, 2020
    Date of Patent: November 28, 2023
    Assignee: SCI ENGINEERED MATERIALS, INC.
    Inventors: Ian Ravary, Jeremy Young
  • Display having a transparent conductive oxide layer comprising metal doped zinc oxide applied by sputtering
    Patent number: 10613397
    Abstract: The invention provides an alternative liquid crystal and light emitting display which include at least one Transparent Conductive Oxide layers which comprises a zinc oxide doped with a group III, IV, V, or transition metal dopant, and sputtered from a sputtering target. In a further embodiment, this Transparent Conductive Oxide layer can optionally include a layer of a patternable TCO, such as ITO.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: April 7, 2020
    Assignee: SCI ENGINEERED MATERIALS, INC.
    Inventors: Robert McGinnis, Jing Yang, Tzu-Chieh Lin
  • Process for the removal of contaminants from sputtering target substrates
    Patent number: 10138545
    Abstract: The present invention provides a process for the removal of contaminants on a spent sputtering target used in Plasma Vapor Deposition by the steps of grit abrasion, organic solvent cleaning, and being subjected to an electric field in an acidic bath including a surfactant, and followed by subsequent water and air rinse and further grit abrasion. Removal of the contaminants is verified by spectroscopy.
    Type: Grant
    Filed: February 2, 2017
    Date of Patent: November 27, 2018
    Assignee: SCI ENGINEERED MATERIALS, INC.
    Inventor: Jeremy R. Young
  • Display having a transparent conductive oxide layer comprising metal doped zinc oxide applied by sputtering
    Patent number: 9927667
    Abstract: The invention provides an alternative liquid crystal and light emitting display which include at least one Transparent Conductive Oxide layers which comprises a zinc oxide doped with a group III, IV, V, or transition metal dopant, and sputtered from a sputtering target. In a further embodiment, this Transparent Conductive Oxide layer can optionally include a layer of a patternable TCO, such as ITO.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: March 27, 2018
    Assignee: SCI ENGINEERED MATERIALS, INC.
    Inventors: Robert McGinnis, Jing Yang, Tzu-Chieh Lin