Abstract: A non-contact substrate chuck applies to sucking a substrate and comprises a first plate-like element, a second plate-like element paralleled the first plate-like element and a sucking element, wherein through holes of the first plate-like element and the second plate-like element jointly form a channel where the sucking element is accommodated. The chuck lets gas flow through a gas inlet of the sucking element toward the substrate to form a gap between an active surface of the substrate and a first surface of the first plate-like element. At least one side of the substrate is positioned by positioning protrusions of the first plate-like element. A least possible number of supporting points are used and arranged around the sides of the substrate without touching the substrate surface to prevent the substrate surface from being damaged. The present invention also discloses a vertical-type substrate supporting apparatus using the abovementioned chuck.

Abstract: An electricity storage device and a portable electric-powered tool. The device comprises at least a battery; at least a super capacitor, which has lower internal impedance, when fully charged, than that of the battery and connects the battery in parallel; and an output end for supplying the electricity. The super capacitor is the major power supply for the pulse current output; the battery is used for generating electricity to the super capacitor and is the secondary power supply for the pulse current output. The connection of the battery and the super capacitor does not need any converters or current-limiting resistors.