Patents Assigned to Scientific Computing International
  • Spectroscopic ellipsometry system for thin film imaging
    Publication number: 20230010806
    Abstract: A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.
    Type: Application
    Filed: September 27, 2017
    Publication date: January 12, 2023
    Applicant: Scientific Computing International
    Inventors: Emad Zawaideh, Chris Claypool
  • Nondestructive optical technique for simultaneously measuring optical constants and thickness of thin films
    Patent number: 7463355
    Abstract: Optical systems and methods that simultaneously measure optical constants (n, k) and thickness of thin films. The systems and methods use of differential polarimetry (differential analysis of spectroscopic multi-angle reflection and ellipsometric data) to measure optical constants (n k) and thickness of ultra-thin films.
    Type: Grant
    Filed: June 12, 2003
    Date of Patent: December 9, 2008
    Assignee: Scientific Computing International
    Inventor: Emad Zawaideh