Patents Assigned to SCS Thomson Microelectronics S.r.l.
  • Hermetically sealed semiconductor inertial sensor
    Patent number: 6289732
    Abstract: An inertial sensor has a sensing element formed on one surface of a chip of semiconductor material and which is movable with respect to the chip. The sensing element is enclosed in a sealed hollow structure, in which the hollow structure includes a metal wall disposed on the surface around the sensing element, and a closure plate fixed to the wall.
    Type: Grant
    Filed: December 9, 1997
    Date of Patent: September 18, 2001
    Assignee: SCS Thomson Microelectronics S.r.l.
    Inventors: Bruno Murari, Paolo Ferrari, Benedetto Vigna