Patents Assigned to SCSS Instruments, Inc.
  • Patent number: 4637713
    Abstract: A pellicle mounting apparatus characterized by a pair of pellicle holder assemblies positioned on either side of a photomask holder assembly. A drive mechanism is coupled between the two pellicle holder assemblies to exert a simultaneous force on the two assemblies to drive them towards or away from the photomask holder assembly. An alignment assembly including a pair of telescopes are first aligned with pellicle holder assemblies, and then the photomask is adjusted to align it with the telescopes. Once the pellicle holder assemblies and photomask holder assembly are properly aligned, pellicles can be repeatedly and accurately attached to opposing sides of a series of photomasks.
    Type: Grant
    Filed: September 27, 1985
    Date of Patent: January 20, 1987
    Assignee: SCSS Instruments, Inc.
    Inventors: Arthur M. Shulenberger, John A. Piatt