Patents Assigned to SD SENSORDYNAMICS AG
  • MICROELECTROMECHANICAL INERTIAL SENSOR WITH ATMOSPHERIC DAMPING
    Publication number: 20110016972
    Abstract: The present invention relates to an inertial sensor, preferably an acceleration sensor or multi-axis acceleration sensor as a microelectromechanical construction element, said sensor comprising a housing with at least one first gas-filled cavity in which a first detection unit is disposed moveably relative to the housing for detection of an acceleration to be detected, wherein the inertial sensor comprises a damping structure.
    Type: Application
    Filed: March 25, 2009
    Publication date: January 27, 2011
    Applicants: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., SD SENSORDYNAMICS AG
    Inventor: Wolfgang REINERT