Abstract: A probe card facilitates a wiring connection, reducing working time and preventing a working error and includes a main circuit board having an opening in its center. A reinforcement member has a lower end coupled to that opening to prevent deforming the board. A sub-circuit board electrically connected to the main board is seated on an upper side of the reinforcement member. A space transformer is positioned on a lower portion of the opening of the main board. A plurality of wires have both ends inserted into through holes in the sub-circuit board and space transformer to electrically connect them. Probes are provided on a lower portion of the space transformer, each having one end in contact with the wire inserted into the through-hole of the space transformer and the other end in contact with a wafer to be tested.
Type:
Grant
Filed:
November 1, 2011
Date of Patent:
May 13, 2014
Assignee:
SDA Co., Ltd.
Inventors:
Duk Kyu Lee, Chang Min Im, Sang Bum Sim, Yun Kee Cho