Patents Assigned to SEAGATE TECHNOLGOY LLC
  • METHOD OF FABRICATING A BPM TEMPLATE USING HIERARCHICAL BCP DENSITY PATTERNS
    Publication number: 20150294680
    Abstract: The embodiments disclose a method including patterning a template substrate to have different densities using hierarchical block copolymer density patterns in different zones including a first pattern and a second pattern, using a first directed self-assembly to pattern a first zone in the substrate using a first block copolymer material, and using a second directed self-assembly to pattern a second zone in the substrate using a second block copolymer material.
    Type: Application
    Filed: April 11, 2014
    Publication date: October 15, 2015
    Applicant: SEAGATE TECHNOLGOY LLC
    Inventors: XiaoMin Yang, Shuaigang Xiao, Kim Y. Lee, Koichi Wago, Philip Steiner