Abstract: A rotary axis fluid supply device is provided. The rotary axis fluid supply device according to an embodiment of the disclosure includes a rotating hollow outer housing, an inner housing accommodated in the outer housing, a hollow rotary shaft accommodated in the inner housing, fixed to the outer housing, and rotating with the outer housing, a fluid supply port housing accommodating one end of the rotary shaft and allowing the rotary shaft to rotate inside, a first sealing portion sealing between the inner housing and the rotary shaft, and a second sealing portion sealing between the fluid supply port housing and the rotary shaft, wherein fluid is supplied from the fluid supply port housing to a fluid supply path inside the hollow rotary shaft.

Abstract: A linear feedthrough is provided. The linear feedthrough according to an embodiment of the disclosure includes a hollow housing connected to the chamber, a shaft accommodated in the housing, and having one end penetrating a wall of the chamber and connected to a susceptor to lift/lower the susceptor, a sealing portion disposed in the housing to seal a gap between the housing and the shaft, and including a plurality of seals to perform sealing even when the shaft performs a linear motion within the housing, and purge flow paths disposed between the plurality of seals and discharging foreign substances between the plurality of seals to the outside.

Abstract: A rotating shaft sealing device is provided. The rotating shaft sealing device includes a shaft having one end connected to a semiconductor loading unit to transmit rotational force to the semiconductor loading unit, an outer housing to which the other end of the shaft is fixedly coupled and accommodating the shaft therein, an inner housing surrounding an outer circumferential surface of the shaft and installed on an inner surface of the outer housing, and having one end with a flange connected to a chamber of a semiconductor substrate processing apparatus, one or more bearings provided between the outer housing and the inner housing to enable relative rotation between the outer housing and the inner housing, and a sealing portion including a plurality of seals disposed in the inner housing and the outer housing to seal a gap between the inner housing and the outer housing.

Abstract: Provided is a component transfer device. The component transfer device includes: a hollow housing provided with, along an outer diameter thereof, one or more fluid ports forming vacuum or pressure; a shaft provided rotatably with respect to the housing inside the housing, and provided with, on an outer diameter thereof, a plurality of communication holes for selectively communicating with the one or more fluid ports according to a rotation location; and a roller fixed to the shaft and rotating together with the shaft, and provided with, on an outer diameter thereof, a plurality of roller holes communicating in response to locations of the plurality of communication holes.

Abstract: Provided is a component transfer device. The component transfer device includes: a hollow housing provided with, along an outer diameter thereof, one or more fluid ports forming vacuum or pressure; a shaft provided rotatably with respect to the housing inside the housing, and provided with, on an outer diameter thereof, a plurality of communication holes for selectively communicating with the one or more fluid ports according to a rotation location; and a roller fixed to the shaft and rotating together with the shaft, and provided with, on an outer diameter thereof, a plurality of roller holes communicating in response to locations of the plurality of communication holes.

Abstract: Provided is a linear movable rotary union including a driving shaft comprising a plurality of fluid supply paths; a hollow middle housing surrounding an outside of the driving shaft and comprising a plurality of first through holes in a sidewall; a plurality of first sealing members provided between the middle housing and the driving shaft to prevent leakage of a fluid; a hollow outer housing surrounding an outside of the middle housing and comprising a plurality of second through holes in a sidewall; and a plurality of second sealing members provided between the middle housing and the outer housing to prevent leakage of the fluid, and wherein the driving shaft is installed to be capable of rotational motion in the middle housing, and the middle housing is installed to be capable of reciprocating motion in an axial direction in the outer housing.

Abstract: Provided is a rotating shaft sealing device. The rotating shaft sealing device mounted in a semiconductor substrate processing apparatus that processes a semiconductor substrate while rotating a semiconductor loading unit accommodating the semiconductor substrate, includes: a housing that is hollow and mounted in the semiconductor substrate processing apparatus; a rotating shaft accommodated in the housing and connected to the semiconductor loading unit to transfer a rotational force to the semiconductor loading unit; a bearing rotatably supporting the rotating shaft in the housing; a sealing unit including a plurality of seals arranged in the housing to tightly seal a gap between the housing and the rotating shaft; and a power transfer unit mounted at an end of the rotating shaft to transfer a rotational force to the rotating shaft.

Abstract: Provided is a sealing apparatus capable of linear and rotational motion including a housing; a hollow first shaft penetrating and coupled to the housing; a first sealing member provided between the housing and the first shaft to seal therebetween; a second shaft of which at least a part is inserted into the first shaft; a second sealing member provided between the first shaft and the second shaft to seal therebetween; and a third sealing member provided on either an inner circumferential surface of the first shaft or an outer circumferential surface of the second shaft.

Abstract: Provided is a component transfer device. The component transfer device includes: a hollow housing provided with, along an outer diameter thereof, one or more fluid ports forming vacuum or pressure; a shaft provided rotatably with respect to the housing inside the housing, and provided with, on an outer diameter thereof, a plurality of communication holes for selectively communicating with the one or more fluid ports according to a rotation location; and a roller fixed to the shaft and rotating together with the shaft, and provided with, on an outer diameter thereof, a plurality of roller holes communicating in response to locations of the plurality of communication holes.

Abstract: Provided is a rotating shaft sealing device. The rotating shaft sealing device mounted in a semiconductor substrate processing apparatus that processes a semiconductor substrate while rotating a semiconductor loading unit accommodating the semiconductor substrate, includes: a housing that is hollow and mounted in the semiconductor substrate processing apparatus; a rotating shaft accommodated in the housing and connected to the semiconductor loading unit to transfer a rotational force to the semiconductor loading unit; a bearing rotatably supporting the rotating shaft in the housing; a sealing unit including a plurality of seals arranged in the housing to tightly seal a gap between the housing and the rotating shaft; and a power transfer unit mounted at an end of the rotating shaft to transfer a rotational force to the rotating shaft.

Abstract: Provided is a sealing apparatus capable of linear and rotational motion including a housing; a hollow first shaft penetrating and coupled to the housing; a first sealing member provided between the housing and the first shaft to seal therebetween; a second shaft of which at least a part is inserted into the first shaft; a second sealing member provided between the first shaft and the second shaft to seal therebetween; and a third sealing member provided on either an inner circumferential surface of the first shaft or an outer circumferential surface of the second shaft.

Abstract: Provided is a linear movable rotary union including a driving shaft comprising a plurality of fluid supply paths; a hollow middle housing surrounding an outside of the driving shaft and comprising a plurality of first through holes in a sidewall; a plurality of first sealing members provided between the middle housing and the driving shaft to prevent leakage of a fluid; a hollow outer housing surrounding an outside of the middle housing and comprising a plurality of second through holes in a sidewall; and a plurality of second sealing members provided between the middle housing and the outer housing to prevent leakage of the fluid, and wherein the driving shaft is installed to be capable of rotational motion in the middle housing, and the middle housing is installed to be capable of reciprocating motion in an axial direction in the outer housing.

Abstract: A sealing device for a drive shaft is disclosed and described. The sealing device for a drive shaft comprises a housing disposed to surround the drive shaft between the inner space and the outer space, a plurality of sealing members axially separated from each other between the housing and the drive shaft to seal between the housing and the drive shaft, fixing ring members interposed between the plurality of sealing members to maintain the separation distance between the sealing members, and a fixing member secured to the housing to apply an axial pressure to the plurality of sealing members and fixing ring members, wherein a concave-convex section is formed on at least one of the close surfaces of the fixing ring member and the sealing member, which face each other.

Abstract: One embodiment of the present invention relates to a sealing system having a leakage sensing function. A leakage sensing unit is arranged in a sealed space which is formed between sealing members of a sealing device body so as to sense, in real time, whether the sealing members are leaking, wherein a sensing value of the leakage sensing unit can be transmitted to the outside by using a communication unit.

Abstract: One embodiment of the present invention relates to a sealing system having a leakage sensing function. A leakage sensing unit is arranged in a sealed space which is formed between sealing members of a sealing device body so as to sense, in real time, whether the sealing members are leaking, wherein a sensing value of the leakage sensing unit can be transmitted to the outside by using a communication unit.