Patents Assigned to SEASTAR CHEMICALS ULC
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Patent number: 11802134Abstract: A class of organometallic compounds is provided. The compounds correspond in structure to Formula 1 (A)x-M-(OR3)4-x wherein: A is selected from the group consisting of —NR1R2, —N(R4)(CH2)nN(R5R6), —N?C(NR4R5)(NR6R7), OCOR1, halo and Y; R1 and R2 are independently selected from the group consisting of H and a cyclic or acyclic alkyl group having from 1 to 8 carbon atoms, with the proviso that at least one of R1 and R2 must be other than H; R4, R5, R6 and R7 are independently selected from the group consisting of H and an acyclic alkyl group having from 1 to 4 carbon atoms; Y is selected from the group consisting of a 3- to 13-membered heterocyclic radical containing at least one nitrogen atom; R3 is a cyclic or acyclic alkyl group having from 1 to 6 carbon atoms; M is selected from the group consisting of Si, Ge, Sn, Ti, Zr and Hf; x is an integer from 1 to 3; and n is an integer from 1 to 4.Type: GrantFiled: February 10, 2017Date of Patent: October 31, 2023Assignee: SEASTAR CHEMICALS ULCInventors: Rajesh Odedra, Cunhai Dong, Shaun Cembella
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Patent number: 11643422Abstract: Disclosed herein are methods of purifying compounds useful for the deposition of high purity tin oxide and high purity compounds purified by those methods. Such compounds are those of the Formula as follows Rx—Sn-A4-x, wherein: A is selected from the group consisting of (YaR?z) and a 3- to 7-membered N-containing heterocyclic group; each R group is independently selected from the group consisting of an alkyl or aryl group having from 1 to 10 carbon atoms; each R? group is independently selected from the group consisting of an alkyl, acyl or aryl group having from 1 to 10 carbon atoms; x is an integer from 0 to 4; a is an integer from 0 to 1; Y is selected from the group consisting of N, O, S, and P; and z is 1 when Y is O, S or when Y is absent and z is 2 when Y is N or P.Type: GrantFiled: March 30, 2020Date of Patent: May 9, 2023Assignee: SEASTAR CHEMICALS ULCInventors: Rajesh Odedra, Cunhai Dong, Diana Fabulyak, Wesley Graff
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Patent number: 11498938Abstract: A method for forming a metal-containing film includes: a) providing at least one substrate; b) delivering to said substrate at least one compound of Formula 1 in the gaseous phase, (R1R2R3 (Si))—Co(CO)4 (Formula 1), wherein R1, R2 and R3 are independently selected lower alkyl groups; and c) simultaneously with or subsequently to step b), delivering to said substrate a co-reagent in the gaseous phase, the co-reagent being lower alcohol. Further, a method of selectively depositing a metal-containing film includes: a) providing at least two substrates comprising different materials, one of said at least two substrates has an affinity for Si and another of said at least two substrates has an affinity for CO; b) delivering to said substrates at least one compound of the Formula 1 in the gaseous phase; and c) simultaneously with or subsequently to step b), delivering to said at least two substrates at least one co-reagent in the gaseous phase.Type: GrantFiled: September 2, 2020Date of Patent: November 15, 2022Assignee: SEASTAR CHEMICALS ULCInventors: Rajesh Odedra, Cunhai Dong, Shaun Cembella
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Publication number: 20220306657Abstract: Specific organometallic compounds of Formula I: Qx-Sn-(A1R1?z)4-x or Formula II: Sn(NR2(CH2)nA2)2 useful for the deposition of high purity tin oxide, as well as methods of using such compounds are disclosed. Also disclosed are compositions of organometallic compounds useful for the deposition of high purity tin oxide that in combination improve stability. Also disclosed are processes for dry etching tin oxide with a particular etchant gas and/or a process for dry etching a substrate using a particular etchant gas with a specific additive.Type: ApplicationFiled: August 28, 2020Publication date: September 29, 2022Applicant: SEASTAR CHEMICALS ULCInventors: Diana FABULYAK, Rajesh ODEDRA, Wesley Phillip GRAFF, Shaun CEMBELLA, Cassidy CONOVER
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Publication number: 20210214379Abstract: Disclosed herein are methods of purifying compounds useful for the deposition of high purity tin oxide and high purity compounds purified by those methods. Such compounds are those of the Formula as follows Rx—Sn-A4-x wherein: A is selected from the group consisting of (YaR?z) and a 3- to 7-membered N-containing heterocyclic group; each R group is independently selected from the group consisting of an alkyl or aryl group having from 1 to 10 carbon atoms; each R? group is independently selected from the group consisting of an alkyl, acyl or aryl group having from 1 to 10 carbon atoms; x is an integer from 0 to 4; a is an integer from 0 to 1; Y is selected from the group consisting of N, O, S, and P; and z is 1 when Y is O, S or when Y is absent and z is 2 when Y is N or P.Type: ApplicationFiled: March 26, 2021Publication date: July 15, 2021Applicant: SEASTAR CHEMICALS ULCInventors: Rajesh ODEDRA, Cunhai DONG, Diana FABULYAK, Wesley GRAFF
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Publication number: 20200399300Abstract: Organometallic compounds useful in chemical phase deposition processes such as atomic layer deposition (ALD) and chemical vapor deposition (CVD).Type: ApplicationFiled: September 2, 2020Publication date: December 24, 2020Applicant: SEASTAR CHEMICALS ULCInventors: Rajesh ODEDRA, Cunhai DONG, Shaun CEMBELLA
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Publication number: 20200223877Abstract: Disclosed herein are methods of purifying compounds useful for the deposition of high purity tin oxide and high purity compounds purified by those methods. Such compounds are those of the Formula as follows Rx—Sn-A4-x, wherein: A is selected from the group consisting of (YaR?z) and a 3- to 7-membered N-containing heterocyclic group; each R group is independently selected from the group consisting of an alkyl or aryl group having from 1 to 10 carbon atoms; each R? group is independently selected from the group consisting of an alkyl, acyl or aryl group having from 1 to 10 carbon atoms; x is an integer from 0 to 4; a is an integer from 0 to 1; Y is selected from the group consisting of N, O, S, and P; and z is 1 when Y is O, S or when Y is absent and z is 2 when Y is N or P.Type: ApplicationFiled: March 30, 2020Publication date: July 16, 2020Applicant: SEASTAR CHEMICALS ULCInventors: Rajesh ODEDRA, Cunhai DONG, Diana FABULYAK, Wesley GRAFF