Patents Assigned to Seiko Epson Coropration
  • Patent number: 5537666
    Abstract: In order to manufacture a surface emission type semiconductor laser, a plurality of semiconductor layers including a multilayered semiconductor mirror, a cladding layer, an active layer and other layers are sequentially formed on a substrate through the organic metal vapor growth method. A photoresist mask is then formed on the semiconductor layers. At least the cladding layer in the semiconductor layers is anisotropically etched by the use of the photoresist mask. At least one column-like portion is thus formed to have sidewalls extending perpendicular to the substrate and to guide the light in a direction perpendicular to the substrate. Thereafter, a buried layer including a single layer formed therein at an area covering at least the sidewalls of the column-like portion is formed around the column-like portion. A multilayered dielectric mirror is deposited in the column-like portion on the light exit end thereof.
    Type: Grant
    Filed: October 7, 1994
    Date of Patent: July 16, 1996
    Assignee: Seiko Epson Coropration
    Inventors: Katsumi Mori, Tatsuya Asaka, Hideaki Iwano, Takayuki Kondo