Abstract: A piezoelectric element with stable and excellent piezoelectric properties is made by: a step of forming a diaphragm 30 (31, 32) on a substrate 20 (S1); a step of forming a bottom electrode 33 on the diaphragm 30 (S2); a step of forming a first piezoelectric layer 43a on the bottom electrode 33 (S3); a step of patterning both the piezoelectric layer 43a and the bottom electrode 33 (S4); a step of forming a second piezoelectric layer on the piezoelectric layer 43a and on the diaphragm 30 to mature a piezoelectric film 43 (S5); and a step of forming a top electrode 44 on the piezoelectric film 43 (S6).

Abstract: In a substrate, a portion for forming wiring extending to a connection terminal is provided with a recess. The connection terminal and the wiring are covered by an interlayer insulating film, and an opening is provided in a portion corresponding to the connection terminal. Thereby, a difference in level between the connection terminal and the wiring extending thereto is reduced.

Abstract: The invention is a digital driver that enables an output terminal to be in a high-impedance condition for driving data lines, and an inspection circuit that is provided at ends of the data lines opposite to the digital driver. The inspection circuit includes bi-directional switches provided for each of the plurality of respective data lines, and a controller that controls the switching of the switches. By using the inspection circuit provided at the opposite ends of the data lines, inspections of data-line disconnection or digital-driver output can be performed as well as determining whether or not there is a point defect. In addition, since the circuit is designed only for inspection, its size is extremely small, and the circuit can be disposed in a dead space.

Abstract: A non-volatile semiconductor memory device has a memory cell array region in which a plurality of memory cells are disposed in both column and row directions, each of the memory cells having first and second MONOS memory cells controlled by a word gate and control gates. The memory cell array region is divided in the row direction into a plurality of sector regions extending longitudinally in the column direction. Each of the sector regions is divided into a plurality of large blocks, such as eight large blocks. There are eight control gate drivers for each sector region. Each of these eight control gate drivers sets potentials for first and second control gates of all the memory cells disposed within the corresponding one block of the eight large blocks.

Abstract: This printing apparatus is provided having a regular status data generating circuit for regularly generating status data. An automatic status selection and transmission circuit selects the status condition to be transmitted by the automatic status transmission operation, and a status data comparator compares the status data. By executing the automatic status selection and transmission command, the status is thereafter transmitted each time the selected status changes.

Abstract: A sheet end detecting mechanism incudes: an optical-type sheet detector which is sensitive to a reflected light from a recording sheet surface is disposed at a slightly upper-path-side part of the printing position in a sheet conveyance direction; and an auxiliary mechanical-type sheet end detector which is displaced by passing of a recording sheet is disposed on the upper path side of the sheet detecting means.