Abstract: A device for detecting a bending magnitude of a rotary shaft comprises a first pair of coils spaced from and facing the outer surface of a shaft and having an inductance value, and a second pair of coils spaced from and facing the outer surface of the shaft and connected in series to the first pair of coils at respective nodal points. The second pair of coils has an inductance value different from the inductance value of the first pair of coils. A pair of high frequency oscillators applies a high frequency voltage across the first and second pairs of coils to generate at each of the nodal points an output signal corresponding to a bending magnitude of the shaft, each output signal having a constant linearity characteristic resulting from the difference in inductance value between the first and second pairs of coils. An amplifier is connected to each of the nodal points for amplifying the output signals from the nodal points.

Abstract: A grinding machine comprises a table movably disposed on a fixed base to undergo reciprocal movement relative to the fixed base along a reciprocating axis. A first shaft is rotatably disposed on the table to undergo rotation relative to the table about a first axis extending perpendicular to the reciprocating axis. A workpiece holder is connected to the first shaft for rotation therewith. A workpiece having a work surface is connected to the workpiece holder for rotation therewith. A second shaft is rotatably supported for rotation about a second axis extending at an inclination angle to the first axis, and is supported for reciprocal movement towards and away from the workpiece along the second axis. A grinder having a grinding surface is connected to the second shaft for rotation therewith and for reciprocal movement of the grinding surface towards and away from the work surface of the workpiece.

Abstract: A conveyor is of a low power consumption type and has a decreased amount of gas generation. The conveyor is provided with a floating member having a conveying rod on which a workpiece is laid; a conveying body magnetically coupled with the floating member through a sleeve-like partition wall; sensor portions for detecting positions of the floating member; electromagnets for generating magnetic forces for supporting the floating member; targets provided on the floating member so as to face the electromagnets; and an adjusting unit for taking a balance of forces to be applied to the magnetic support portions composed of the electromagnets, the targets and the sensor portions. With thus constructed conveyor, even if the conveying article load (i.e., workpiece weight) is changed, a space between the floating member and the sensor portions may be adjusted within a controllable range with a small amount, of excited magnetic current by the adjusting unit.

Abstract: A grinding wheel spindle assembly comprises a first casing and a second casing spaced apart from and facing the first casing. A shaft has one end fixed to the first casing and another opposite end fixed to the second casing. A hollow, cylindrical-shaped rotor is rotatably disposed over the shaft between the first and second casings for rotation relative to the shaft. A flange having opposite side surfaces is connected to an outer circumference of the rotor for rotation therewith. A grindstone is connected to an outer circumference of the flange for rotation therewith. A radial magnetic bearing magnetically supports the rotor in its radial direction, and an axial magnetic bearing magnetically supports the rotor in its axial direction. At least one driving motor is provided for rotating the rotor about a center axis thereof.

Abstract: An electrolytic combined processing machine includes a grinding wheel spaced apart from and facing a workpiece, a current switching circuit for switching a coarse grinding to a fine grinding of the workpiece by the grinding wheel, and an infeed switching circuit for switching the infeed speed of an infeed table which allows the grinding wheel to relatively approach the workpiece. The switching operation is based on a measurement result obtained from a size measuring unit which measures a processing amount of the workpiece. During fine grinding, the infeed speed of the grinding wheel is the same as the speed of a passivation coating film generated on the workpiece. Workpieces, particularly of brittle materials, can be processed in a state of less processing distortion with improved surface roughness, flatness and efficiency.

Abstract: An reaction vessel utilizes a sample carrier composed of a magnetic core and a surface coating effective to support sample of protein or peptide. The sample carrier is floated magnetically and positioned within a reaction chamber. Edman reagent is applied to the sample to effect amino acid sequence analysis of protein or peptide from amino-terminal. By such construction, reaction efficiency is increased to produce sequentially thiazolinon amino-acid derivatives to thereby increase number of identified remaining amino acids, thereby enabling microanalysis of sample.

Abstract: The NC complex automatic lathe is provided with a main spindle receptive therein a workpiece for chucking the same such as to protrude a front end portion of the workpiece, and a main spindle base for supporting the main spindle rotatably around a center axis and displaceably in a lengthwise direction of the workpiece. A turret type tool slide is disposed in the vicinity of the front end portion of the workpiece. The turret type tool slide is displaced transversely toward the center of the workpiece. A plurality of tool slide members are arranged radially around the front end portion of the workpiece in a free space away from the moving area of the turret type tool slide such as to undergo displacements toward the center of the workpiece.

Abstract: A rotary vane compressor comprises a cylinder having two closed ends defining a cylinder chamber in which is rotatably mounted a rotor. The rotor carries a plurality of radially movable vanes which move radially into sliding contact with the inner surface of the cylinder chamber during rotation of the rotor to compress a refrigerant gas. The rotor is rotationally driven by a rotor shaft rotatably mounted by bearings in the cylinder ends. To prevent destruction of the ozone layer, a refrigerant containing no chlorine, such as HFC-134a (1,1,1,2-tetrafluoroethane; CH.sub.2 FCF.sub.3) is used, and to compensate for the inferior lubricating properties of the chlorine-free refrigerant, the bearings are provided with a manganese phosphate coating of 10 .mu.m-15 .mu.m thickness to prevent cohesion and seizure of the mutually contacting surfaces of the bearings and rotor shaft.

Abstract: A computerized numerical control automatic complex lathe has a main spindle for gripping and rotating a work to be machined. A first machining tool performs a main machining of the work. A turret tool rest has an outer peripheral surface for holding a set of secondary tools along the outer peripheral surface thereof. The turret tool rest is selectively indexable to bring a selected secondary machining tool into a position to effect a secondary machining of the work and is selectively movable relative to the work to enable the selected secondary machining tool to perform the secondary machining of the work. The turret tool rest further includes a plurality of tool holders for holding a plurality of secondary tools. A back spindle is disposable on a side of the work opposite the main spindle for holding a selected secondary machining tool selected from the plurality of secondary tools.

Abstract: A hard disk inspection apparatus has a fixed magnetic head for magnetically recording data on and reproducing data from an outside recording area of the back surface of a hard disk and a fine-adjustment magnetic head with a micrometer mechanism for magnetically recording data on and reproducing data from an outside recording area of the front surface of the hard disk. Both heads are mounted on a carriage. A fixed magnetic head for magnetically recording data on and reproducing data from an inside recording area of the back surface of the hard disk and a fine-adjustment magnetic head with another micrometer mechanism for magnetically recording data on and reproducing data from an inside recording area of the front surface of the hard disk are both mounted on another carriage. This arrangement enables easy and accurate alignment between the magnetic heads and improves the inspection efficiency.

Abstract: A transporting device of the magnetically floating type is disposed in a central area of a multi-chamber to transport a semiconductor wafer into and out of peripheral processing rooms. The transporting device is comprised of a movable slider member having a working arm disposed along an axial direction and a server disposed at an end portion of the working arm for carrying a wafer. An electromagnet magnetically floats the slider member to drive the same in the axial direction. Sensors sense the size of the gap between the electromagnet and the slider member. Based on the magnitude of the gap, a PID circuit controls an electric current supplied to the electromagnet to maintain the slider member in a horizontal attitude state. A comparator operates to detect a variation in the electric current flowing through the electromagnet in order to determine whether the server is loaded with the wafer.

Abstract: A conveyor for conveying a workpiece in a vacuum chamber includes a floating body having a conveying rod, a pair of magnetic bearing portions disposed in a moving direction of the floating body and supporting the floating body solely by magnetic forces, and a non-contact driving motor portion for directly reciprocating the floating body. The floating body is directly reciprocated by a linear pulse motor. The linear pulse motor comprises a motor main body and a cog portion, and the motor main body is interposed between a pair of magnetic bearing portions. The cog portion is disposed in a longitudinal or axial direction of the outer peripheral surface of the floating body and coacts with the motor main body to reciprocate the floating body.

Abstract: An apparatus for detecting defects in a processing track on a hard disc uses an average or mean average level value as a reference value, in which an arithmetic means computes the average or mean average level value based on an average level value (Track Average Amplitude or TAA) for a plurality of tracks prior to the processing track which is stored in a memory means. The apparatus enables obtaining the reference value with less dispersion, which gives even and stable detected results of any defect in each track on the hard disc, and enables improvement in the efficiency of the throughput.

Abstract: An armature stator comprises an iron core and a coil directly mounted on the iron core. The coil is composed of wound electric wire which has a coating comprising an inorganic material, such as ceramic. A bonding material of the inorganic material is formed over the coil and iron core for filling any gaps and adhering the coil and iron core together into a unitary structure. To improve the reliability of the coil, after the electric wire is wound to form the coil, a filling material comprised of the inorganic material is formed over the coil by vacuum impregnation, and then sintered so as to repair defects in the coating disposed on the electric wire. After the bonding material is formed over the coil, which is directly mounted on the iron core, it is cured under high temperature. The armature stator thus constructed can be used with high reliability in high temperature and high vacuum applications.

Abstract: A magnetic disk inspection apparatus for recording and reproducing inspection signals onto and from each track on a magnetic disk, in which the inspection signals are recorded and reproduced automatically without a manual operation onto and from the magnetic disk, the maximum value is detected from the reproduction signals on the basis of the sampling signal, the average value of the maximum values is calculated for each sector, the difference between the average values in the same sector number of the adjacent tracks is determined, the change ratio based on this difference is calculated and quality of the magnetic disk is judged on the basis of this change ratio.

Abstract: The transferring device is provided with a cylindrical partition wall formed with reduced thickness portions 14. A floating carrier 3 is disposed around the cylindrical partition wall and is provided with target pieces 15. The reduced thickness portion 14 is formed by recessing the outer peripheral face 1a of the partition wall 1 along the lengthwise direction thereof. Electromagnets 10, 11 are mounted on an actuating block 4 within the tubular partition wall 1 in opposed relation to the reduced thickness portions 14. The target piece 15 are also opposed in alignment with the reduced thickness portions 14. The partition wall 1 has a sufficient thickness other than the reduced thickness portions 14 so as to ensure physical strength of the partition wall 1. Magnetic force is applied from the electromagnets 10, 11 to the target pieces 15 through the reduced thickness partition 14, thereby supporting the floating carrier 3 with a reduced amount of an exciting current flowing through the electromagnets 10, 11.

Abstract: A magnetic disk inspection apparatus for inspecting protuberance on a surface of the magnetic disk. The apparatus includes an inspection head detecting the protuberance by a piezosensor, and rotating speed control circuit controlling a rotating speed of the magnetic disk held by a rotary holder member. The rotating speed control circuit generates a different speed increasing rate for each of concentric zones formed by dividing into a plurality of sections in a radial direction of the magnetic disk to keep a floating height of the inspection head in a predetermined constant value.

Abstract: An apparatus for detecting machining states of a workpiece in a machine tool comprises a non-contact type displacement detector for detecting a radial bending displacement of a spindle in a region between a machining point and a front bearing of a tool spindle or a work spindle. The displacements correspond to states under which the machine tool starts operating, and the tool contacts the workpiece to various unfinished faces, a machining state and a machining surface condition of the workpiece during machining. By inputting the detection signal to different frequency band pass filters, the machining states and the workpiece surface condition are discriminated. A set of comparators compare the output signals from the frequency band pass filters with set reference values. The respective machining states are judged from the comparative results. Comparative judgment signals are inputted to a control unit, thereby controlling the machine tool to automatically perform appropriate machining operations.

Abstract: A contactless guided positioning table has a table body and a movable mount having five-axis control magnetic bearings for supporting the table body movably in a horizontal direction. A contactless linear motor horizontally drives the table body. A vacuum container contains the movable mount movably in a direction vertical to the moving direction of the table body. A coupling member is disposed through a flexible hollow member to secure a vacuum state of the vacuum container and couples the movable mount to an external driver. A controller controls the electric current applied to the magnetic bearings. There is no mechanical contact, such as a sliding guide face and ball screw motor, used in the movement of the table body, thereby preventing dust from being generated by friction due to direct contact. Further, the table does not require lubricating oil which would disadvantageously affect normal operation in a vacuum and effectively avoids deposition and removal of solids.

Abstract: A damper device for a motor having a boss section attached to a rotary shaft of the motor, a mass inertia section rotatably supported by the boss section such that it surrounds the outer periphery of the boss section with a gap left therebetween, a magnetic fluid filling up the gap, and magnets provided in either the boss section or the mass inertia section for preventing leakage of the magnetic fluid. Furthermore, the boss section and the mass section facing each other through the gap are made of materials differing in the coefficient of thermal expansion, even if the magnetic fluid is heated by heating of the motor, an external temperature variation and the like so that its viscosity is decreased, such a decrease in viscosity can be canceled out by a change in gap dimension caused by the difference in expansion between the boss section material and the mass section material differing in the coefficient of thermal expansion.