Patents Assigned to Sela Semiconductor Engineering Ltd.
  • Remote resistivity measurement
    Patent number: 6486685
    Abstract: Apparatus and method for measuring surface resistivity of a wafer (12). A source of high frequency radiation (6, 41) emits an incident wave burst that impinges the wafer at a desired spot location. A reflected wave burst is detected at an appropriate time window by a receiver (8, 42). The relationship between incident and reflected energies is a function of the surface resistivity of the wafer.
    Type: Grant
    Filed: September 8, 2000
    Date of Patent: November 26, 2002
    Assignee: Sela Semiconductor Engineering Ltd.
    Inventor: Dan Hashimshony