Abstract: The present invention relates to an apparatus and a method for producing hydrogen gas. The hydrogen gas production apparatus of the present invention comprises a) a dielectric hollow tube, b) a means for maintaining the dielectric hollow tube to a reduced pressure, c) a microwave source that generates a microwave, d) a waveguide coupled to the microwave source that applies the microwave to the dielectric hollow tube, e) a gas supply source that supplies a hydrogen element-containing gas into the dielectric hollow tube, wherein the hydrogen element-containing gas supplied into the dielectric hollow tube undergoes plasma discharge with aid of the microwave from the waveguide and produces reaction products including hydrogen gas through intramolecular bond breakage rather than heat decomposition, by collision of an electron produced by the plasma discharge with the hydrogen element-containing gas, and f) a separator that separates the hydrogen gas from the reaction products.

Abstract: The present invention relates to a neutral particle beam processing apparatus. More specifically, the present invention relates to a neutral particle beam processing apparatus comprising a plasma discharging space inside which processing gases are converted to plasma ions through a plasma discharge, a heavy metal plate which converts the plasma ions into neutral particles through collisions, a plasma limiter which prevents plasma ions and electrons from passing through and allows the neutral particles produced by collisions of the plasma ions with the heavy metal plate to pass through, and a treating housing inside which a substrate to be treated is located, wherein the plasma discharging space is sandwiched between the heavy metal plate and the plasma limiter.

Abstract: There is provided a method for producing a solid element plasma from a solid lump and a plasma source used in the method. The method of the present invention comprises colliding a solid lump with accelerated particles or lasers to detach solid atoms from the solid lump within a first chamber inside which sputtering of solid atoms is performed, directing the solid atoms to a second chamber inside which plasma discharge is performed, applying a voltage to the second chamber to produce a plasma of solid atoms through plasma discharge, and contacting the plasma of solid atoms to a target to be treated. The present invention avoids problems caused from impurities and poisonous gases of conventional systems adopting a solid element-containing gas as a source of solid element.

Abstract: The present invention relates to an apparatus for treating the surface with neutral particle beams comprising an antenna container, a plasma generating part, a neutral particle beam generating part and a treating part, wherein the antenna container comprises antennas connected to high frequency electric power supply through which high frequency electric power supplies, the plasma generating part transfers gases from a gas injector into plasmas with the supplied power, the neutral particle beam generating part reverts the obtained plasmas to neutral particle beams via the collision thereof with metal plates, and the treating part treats the surface of a target with the neutral particle beams.