Abstract: Embodiments relate generally to semiconductor device fabrication and processes, and more particularly, to systems and methods that implement magnetic field generators configured to generate rotating magnetic fields to facilitate physical vapor deposition (“PVD”). In one embodiment, a system generates a first portion of a magnetic field adjacent a first circumferential portion of a substrate, and can generate a second portion of the magnetic field adjacent to a second circumferential portion of the substrate. The second circumferential portion is disposed at an endpoint of a diameter that passes through an axis of rotation to another endpoint of the diameter at which the first circumferential portion resides. The second peak magnitude can be less than the first peak magnitude. The system rotates the first and second portions of the magnetic fields to decompose a target material to form a plasma adjacent the substrate. The system forms a film upon the substrate.
Type:
Grant
Filed:
July 6, 2015
Date of Patent:
September 12, 2017
Assignees:
SAMSUNG ELECTRONICS CO., LTD., SEMICAT, INC.
Abstract: Embodiments relate generally to semiconductor device fabrication and processes, and more particularly, to an apparatus and arrangements of magnetic field generators configured to generate rotating magnetic fields to facilitate physical vapor deposition (“PVD”). In one embodiment, a magnetic field generator apparatus can include a rotatable magnetic field and a counterbalance magnetic field generator that rotates about the axis of rotation in opposition to the rotatable magnetic field generator. The rotatable magnetic field generator generates a first magnitude of a magnetic field adjacent to a first circumferential portion of a circular region. The counterbalance magnetic field generator generates a second magnitude of the magnetic field adjacent to a second circumferential portion.
Type:
Grant
Filed:
March 15, 2013
Date of Patent:
June 28, 2016
Assignees:
SAMSUNG ELECTRONICS CO., LTD., SEMICAT, INC.
Abstract: Embodiments of the invention relate generally to semiconductor device fabrication and processes, and more particularly, to an apparatus and a system for implementing arrangements of magnetic field generators configured to facilitate physical vapor deposition (“PVD”) and/or controlling impedance matching associated with a non-metal-based plasma used to modify a non-metal film, such as a chalcogenide-based film.
Type:
Application
Filed:
February 17, 2015
Publication date:
January 14, 2016
Applicant:
Semicat, Inc.
Inventors:
Jin Hyun Kim, Michael Nam, Jae Yeol Park, Jonggu Park
Abstract: Embodiments of the invention relate generally to semiconductor device fabrication and processes, and more particularly, to methods for implementing arrangements of magnetic field generators configured to facilitate physical vapor deposition (“PVD”) and/or for controlling impedance matching associated with a non-metal-based plasma used to modify a non-metal film, such as a chalcogenide-based film.
Type:
Application
Filed:
January 13, 2015
Publication date:
December 24, 2015
Applicant:
Semicat, Inc.
Inventors:
Jin Hyun Kim, Michael Nam, Jae Yeol Park, Jonggu Park
Abstract: Embodiments relate generally to semiconductor device fabrication and processes, and more particularly, to systems and methods that implement magnetic field generators configured to generate rotating magnetic fields to facilitate physical vapor deposition (“PVD”). In one embodiment, a system generates a first portion of a magnetic field adjacent a first circumferential portion of a substrate, and can generate a second portion of the magnetic field adjacent to a second circumferential portion of the substrate. The second circumferential portion is disposed at an endpoint of a diameter that passes through an axis of rotation to another endpoint of the diameter at which the first circumferential portion resides. The second peak magnitude can be less than the first peak magnitude. The system rotates the first and second portions of the magnetic fields to decompose a target material to form a plasma adjacent the substrate. The system forms a film upon the substrate.
Abstract: Embodiments of the invention relate generally to semiconductor device fabrication and processes, and more particularly, to an apparatus and a system for implementing arrangements of magnetic field generators configured to facilitate physical vapor deposition (“PVD”) and/or controlling impedance matching associated with a non-metal-based plasma used to modify a non-metal film, such as a chalcogenide-based film.
Type:
Grant
Filed:
August 31, 2009
Date of Patent:
February 17, 2015
Assignee:
Semicat, Inc.
Inventors:
Jin Hyun Kim, Michael Nam, Jae Yeol Park, Jonggu Park
Abstract: Embodiments of the invention relate generally to semiconductor device fabrication and processes, and more particularly, to methods for implementing arrangements of magnetic field generators configured to facilitate physical vapor deposition (“PVD”) and/or for controlling impedance matching associated with a non-metal-based plasma used to modify a non-metal film, such as a chalcogenide-based film.
Type:
Grant
Filed:
August 31, 2009
Date of Patent:
January 20, 2015
Assignee:
Semicat, Inc.
Inventors:
Jin Hyun Kim, Michael Nam, Jae Yeol Park, Jonggu Park
Abstract: Embodiments relate generally to semiconductor device fabrication and processes, and more particularly, to an apparatus and a system that regulates the amount of thermal energy in a semiconductor processing chamber during semiconductor device fabrication and processes. In one embodiment, an apparatus includes a cavity environment controller and a pedestal temperature controller coupled to a semiconductor processing chamber. The cavity environment controller is configured to regulate the temperature of the semiconductor processing chamber through a fluid in a source cavity disposed at the top of the semiconductor processing chamber.
Type:
Application
Filed:
September 10, 2012
Publication date:
March 13, 2014
Applicant:
Semicat, Inc.
Inventors:
Kyle Petersen, Jae Yeol Park, Michael Nam, David Gunther
Abstract: Embodiments relate generally to semiconductor device fabrication and processes, and more particularly, to an apparatus and a system that regulates the amount of thermal energy in a semiconductor processing chamber during semiconductor device fabrication and processes. In one embodiment, an apparatus includes a cavity environment controller and a pedestal temperature controller coupled to a semiconductor processing chamber. The pedestal temperature controller is configured to regulate the temperature of the semiconductor processing chamber through a pedestal disposed at the bottom of the semiconductor processing chamber.
Type:
Application
Filed:
September 10, 2012
Publication date:
March 13, 2014
Applicant:
Semicat, Inc.
Inventors:
Kyle Petersen, Jae Yeol Park, Michael Nam, David Gunther
Abstract: Embodiments of the invention relate generally to semiconductor device fabrication and processes, and more particularly, to an apparatus and a system for implementing arrangements of magnetic field generators configured to facilitate physical vapor deposition (“PVD”) and/or controlling impedance matching associated with a non-metal-based plasma used to modify a non-metal film, such as a chalcogenide-based film.
Type:
Application
Filed:
August 31, 2009
Publication date:
March 3, 2011
Applicant:
Semicat, Inc.
Inventors:
Jin Hyun Kim, Michael Nam, Jae Yeol Park, Jonggu Park
Abstract: Embodiments of the invention relate generally to semiconductor device fabrication and processes, and more particularly, to methods for implementing arrangements of magnetic field generators configured to facilitate physical vapor deposition (“PVD”) and/or for controlling impedance matching associated with a non-metal-based plasma used to modify a non-metal film, such as a chalcogenide-based film.
Type:
Application
Filed:
August 31, 2009
Publication date:
March 3, 2011
Applicant:
Semicat, Inc.
Inventors:
Jin Hyun Kim, Michael Nam, Jae Yeol Park, Jonggu Park