Abstract: A chemical storage container management system for a semiconductor process using short-range wireless communication includes: a chemical supply assembly supplying a chemical accommodated in a chemical storage container accommodating the chemical used for the semiconductor process to a region in which the semiconductor process is performed, and generating a plurality of information related to the chemical storage container; and a monitoring management unit receiving the plurality of information generated by the chemical supply assembly, and determining an operation situation of the chemical supply assembly.

Abstract: A cover device includes a guide module which is coupled to an upper end portion of the container, has an upward inclination at a predetermined angle, has an inclined protruding unit that protrudes, and is formed with a communication port through which the inside and the outside of the housing space communicate; a discharge module in which one side along a longitudinal direction penetrates the communication port and is disposed inside the container, the other side is exposed to the outside to form a discharge port, and an intermediate portion along the longitudinal direction has an expansion fixing unit which is expanded, at least a part of periphery is in contact with an inner surface of the communication port, and is inserted and fixed; and a fixing module which is fixedly coupled to the inclined protruding unit in a state in which the other part of the discharge module penetrates.

Abstract: A cover device includes: a guide module which is coupled to an upper end portion of the container, has an upward inclination at a predetermined angle, has an inclined protruding unit that protrudes, and is formed with a communication port through which the inside and the outside of the housing space communicate; a discharge module which is formed in a long pipe shape, and in which one side along a longitudinal direction penetrates the communication port and is disposed inside the container, the other side is exposed to the outside to form a discharge port; and a fixing module which is fixedly coupled to the inclined protruding unit in a state in which the other part of the discharge module penetrates, and is formed so that the discharge module is pressed toward the guide module.

Abstract: An apparatus for monitoring particles in a chemical solution includes a chemical solution supply device that stores a chemical solution and supplies the chemical solution according to a work start signal of a control unit, a first supply channel that is connected with the chemical solution supply device to supply the chemical solution, a filter that is connected with the first supply channel to purify the chemical solution, a branch channel and a main channel that are branched from the filter, a drain valve that is connected with the branch channel to open and close the branch channel, a particle monitor that is connected with the main channel to detect the amount of particles in the chemical solution, and a dispenser unit that receives the chemical solution from the particle monitor to supply the chemical solution to an object to be worked.