Patents Assigned to Semiconductor Manufacrturing International (Shanghai) Corporation
  • Patent number: 10685962
    Abstract: Dynamic random access memory (DRAM) and fabrication methods thereof are provided. An exemplary fabrication method includes providing a base substrate; forming a gate structure over the base substrate; forming doped source/drain regions in the base substrate at two sides of the gate structure, respectively; forming an interlayer dielectric layer over the gate structure, the base substrate and the doped source/drain regions; forming a first opening, exposing one of the doped source/drain regions at one side of the gate structure, in the interlayer dielectric layer; and forming a memory structure in the first opening and on the one of doped source/drain regions.
    Type: Grant
    Filed: November 7, 2017
    Date of Patent: June 16, 2020
    Assignees: Semiconductor Manufacrturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Xi Lin, Yi Hua Shen