Patents Assigned to Semiconductor Manufacturing International (Shanghai) Corp.
  • Patent number: 10658239
    Abstract: This disclosure provides wafer dicing methods, and relates to the field of semiconductor technologies. Implementations of the dicing method may include: performing laser stealth dicing processing on a wafer from a back surface of the wafer; performing grinding and thinning processing on the back surface of the wafer after performing the laser stealth dicing processing; sticking a dicing tape on the back surface of the wafer after performing the grinding and thinning processing; and performing separation processing on the wafer after sticking the dicing tape. In some implementations, stealth dicing (SD) is performed before grinding, so that a laser is directly imposed on a back surface of a wafer, thereby alleviating a laser attenuation problem and lowering requirements on light transmittance of a dicing tape.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: May 19, 2020
    Assignees: Semiconductor Manufacturing International (Beijing) Corp., Semiconductor Manufacturing International (Shanghai) Corp.
    Inventors: Lihui Lu, Chunchao Fei, Po Yuan Chiang, Yaping Wang
  • Patent number: 10522684
    Abstract: This disclosure relates to a semiconductor structure for, e.g., a high-k metal gate fin field-effect transistor, and a manufacturing method therefor. The method may include providing a substrate structure including a first portion for forming a first PMOS device and a second portion for forming a second PMOS device; forming a first P-type work function adjustment layer on the substrate structure; forming a protective layer on the first P-type work function adjustment layer; patterning the protective layer to expose the first P-type work function adjustment layer on the first portion; oxidizing the exposed first P-type work function adjustment layer on the first portion; removing the protective layer; and forming a second P-type work function adjustment layer on the first P-type work function adjustment layer.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: December 31, 2019
    Assignees: Semiconductor Manufacturing International (Shanghai) Corp., Semiconductor Manufacturing International (Beijing) Corp.
    Inventor: Xin He
  • Patent number: 10522685
    Abstract: The present disclosure teaches semiconductor devices and methods for manufacturing the same. Implementations of the semiconductor device may include: a semiconductor substrate; a semiconductor fin positioned on the semiconductor substrate; and a gate structure positioned on the semiconductor fin, where the gate structure includes a gate dielectric layer on a part of a surface of the semiconductor fin and a gate on the gate dielectric layer; where the gate includes a metal gate layer on the gate dielectric layer and a semiconductor layer on a side surface of at least one side of the metal gate layer; and where the semiconductor layer includes a dopant, where a conductivity type of the dopant is the opposite of a conductivity type of the semiconductor fin. The present disclosure can improve a work function of the device, thereby improving a current characteristic of the device during a working process, reducing the short channel effect (SCE), and lowering a leakage current.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: December 31, 2019
    Assignees: Semiconductor Manufacturing International (Beijing) Corp., Semiconductor Manufacturing International (Shanghai) Corp.
    Inventor: Meng Zhao
  • Patent number: 10522651
    Abstract: The present disclosure relates to the technical field of semiconductors, and discloses a semiconductor device and a manufacturing method therefor. The manufacturing method may include: providing a semiconductor structure, where the semiconductor structure includes a semiconductor fin and an interlayer dielectric layer covering the semiconductor fin, the interlayer dielectric layer having an opening exposing a part of the semiconductor fin; forming a data storage layer at a bottom portion and a side surface of the opening; and filling a conductive material layer in the opening on the data storage layer. The present disclosure facilitate the manufacturing process of the semiconductor device and improves processing compatibility with the CMOS technology.
    Type: Grant
    Filed: November 27, 2017
    Date of Patent: December 31, 2019
    Assignees: Semiconductor Manufacturing International (Shanghai) Corp., Semiconductor Manufacturing International (Beijing) Corp.
    Inventors: Zhuofan Chen, Haiyang Zhang
  • Patent number: 10522613
    Abstract: A resistance device includes a substrate, a fin on the substrate, a trench isolation structure formed around the fin. The resistance device further includes at least one first dummy gate structure on the fins, an inter-layer dielectric layer on the trench isolation structure, where the inter-layer dielectric layer covers the fin and the at least one first dummy gate structure. The resistance device further includes a resistance material layer on the inter-layer dielectric layer.
    Type: Grant
    Filed: May 8, 2018
    Date of Patent: December 31, 2019
    Assignees: Semiconductor Manufacturing International (Beijing) Corp., Semiconductor Manufacturing International (Shanghai) Corp.
    Inventor: Fei Zhou
  • Patent number: 10483263
    Abstract: The present disclosure provides a semiconductor device and a manufacturing method therefor.
    Type: Grant
    Filed: May 24, 2017
    Date of Patent: November 19, 2019
    Assignees: Semiconductor Manufacturing International (Shanghai) Corp., Semiconductor Manfacturing International (Beijing) Corp.
    Inventor: Fei Zhou
  • Patent number: 10236216
    Abstract: The present disclosure relates to the technical field of semiconductor processes, and discloses a semiconductor device and a manufacturing method therefor. The semiconductor device includes a substrate; two fins located on the substrate and extending along a first direction; an isolation material layer surrounding the fins, comprising a first isolation regions located at an end region between the two fins along the first direction, and a second isolation region located at sides of the fins along a second direction that is different from the first direction, wherein an upper surface of the first isolation region substantially align with an upper surfaces of the fins, and an upper surface of the second isolation region is lower than the upper surface of the fins; and a first insulating layer on the first isolation region.
    Type: Grant
    Filed: October 3, 2017
    Date of Patent: March 19, 2019
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORP., SMIC ADVANCED TECHNOLOGY RESEARCH & DEVELOPMENT (SHANGHAI) Corp., IMEC INTERNATIONAL
    Inventors: Hai Zhao, Yang Liu, Gang Mao, Cheng-Jui Yang, Yongmeng Lee, Shaofeng Yu
  • Patent number: 10211738
    Abstract: The present application relates to the field of circuit design, and discloses a DC-DC conversion circuit system and a forming method thereof. The system may include a primary switch circuit, a charge/discharge circuit, and a secondary switch circuit. The primary switch circuit includes a voltage supply end configured to receive a first direct current voltage and an output end. The charge/discharge circuit includes an input end connected to the output end of the primary switch circuit, and a first output end configured to output a second direct current voltage. The secondary switch circuit includes a voltage supply end configured to receive the first direct current voltage, and an output end connected to the output end of the primary switch circuit. The primary switch circuit is configured to control the charge/discharge circuit to charge or discharge.
    Type: Grant
    Filed: May 10, 2018
    Date of Patent: February 19, 2019
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORP., SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP.
    Inventor: Qian Weng
  • Patent number: 9799525
    Abstract: A semiconductor device may include the following elements: a first doped region; a second doped region, which contacts the first doped region; a third doped region, which contacts the first doped region; a first dielectric layer, which contacts the above-mentioned doped regions; a first gate member, which is conductive and comprises a first gate portion, a second gate portion, and a third gate portion, wherein the first gate portion contacts the first dielectric layer, wherein the second gate portion is positioned between the first gate portion and the third gate portion, and wherein a width of the second portion is unequal to a width of the third gate portion; a doped portion, which is positioned between the third gate portion and the third doped region; a second gate member; and a second dielectric layer, which is positioned between the third gate portion and the second gate member.
    Type: Grant
    Filed: January 5, 2016
    Date of Patent: October 24, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (Shanghai) CORP.
    Inventors: Wenbo Wang, Hanming Wu
  • Patent number: 9793173
    Abstract: A semiconductor device may include a substrate, an n-channel field-effect transistor positioned on the substrate, and a p-channel field-effect transistor positioned on the substrate. The n-channel field-effect transistor may include an n-type silicide source portion, an n-type silicide drain portion, and a first n-type channel region. The first n-type channel region may be positioned between the n-type silicide source portion and the n-type silicide drain portion and may directly contact each of the n-type silicide source portion and the n-type silicide drain portion.
    Type: Grant
    Filed: April 26, 2016
    Date of Patent: October 17, 2017
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORP.
    Inventor: Deyuan Xiao
  • Patent number: 8884363
    Abstract: A system and method for integrated circuits with surrounding gate structures are disclosed. The integrated circuits system includes a transistor having a gate all around cylindrical (GAAC) nanowire channel with an interposed dielectric layer. The cylindrical nanowire channel being in a middle section of a semiconductor wire pattern connects the source and drain region positioned at the two opposite end sections of the same wire pattern.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: November 11, 2014
    Assignees: Semiconductor Manufacturing International (Shanghai) Corp., Semiconductor Manufacturing International (Beijing) Corp.
    Inventors: De Yuan Xiao, Guo Qing Chen, Roger Lee, Chin Fu Yen, Su Xing, Xiao Lu Huang, Yong Sheng Yang
  • Patent number: 8815615
    Abstract: A method of forming interconnects in integrated circuits includes providing a semiconductor substrate and forming a copper interconnect structure that is formed overlying a barrier layer within a thickness of an interlayer dielectric layer. The copper interconnect structure has a first stress characteristic. The method further loads the semiconductor substrate including the copper interconnect structure into a deposition chamber that contains an inert environment. The semiconductor substrate including the copper interconnect structure is annealed in the inert environment for a period of time to cause the copper interconnect structure to have a second stress characteristic. The semiconductor substrate is maintained in the deposition chamber while an etch stop layer is deposited thereon. The method further deposits an intermetal dielectric layer overlying the etch stop layer, wherein the annealing reduces copper hillock defects resulting from at least the first stress characteristic.
    Type: Grant
    Filed: November 2, 2010
    Date of Patent: August 26, 2014
    Assignees: Semiconductor Manufacturing International (Shanghai) Corp., Semiconductor Manufacturing International (Beijing) Corp.
    Inventors: Duo Hui Bei, Ming Yuan Liu, Chun Sheng Zheng
  • Patent number: 8816449
    Abstract: An integrated circuit structure has a substrate comprising a well region and a surface region, an isolation region within the well region, a gate insulating layer overlying the surface region, first and second source/drain regions within the well region of the substrate. The structure also has a channel region formed between the first and second source/drain regions and within a vicinity of the gate insulating layer, and a gate layer overlying the gate insulating layer and coupled to the channel region. The structure has sidewall spacers on edges of the gate layer to isolate the gate layer, a local interconnect layer overlying the surface region of the substrate and having an edge region extending within a vicinity of the first source/drain region. A contact layer on the first source/drain region in contact with the edge region and has a portion abutting a portion of the sidewall spacers.
    Type: Grant
    Filed: September 17, 2013
    Date of Patent: August 26, 2014
    Assignees: Semiconductor Manufacturing International (Shanghai) Corp., Semiconductor Manufacturing International (Beijing) Corp.
    Inventor: Tzu-Yin Chiu
  • Patent number: 8815680
    Abstract: A method for making a non-volatile memory device provides a semiconductor substrate including a surface region and a tunnel dielectric layer overlying the surface region. Preferably the tunnel dielectric layer is a high-K dielectric, characterized by a dielectric constant higher than 3.9. The method forms a source region within a first portion and a drain region within a second portion of the semiconductor substrate. The method includes forming a first and second nanocrystalline silicon structures overlying the first and second portions between the source region and the drain region to form a first and second floating gate structures while maintaining a separation between the first and second nanocrystalline silicon structures. The method includes forming a second dielectric layer overlying the first and second floating gate structures. The method also includes forming a control gate structure overlying the first and second floating gate structures.
    Type: Grant
    Filed: September 20, 2010
    Date of Patent: August 26, 2014
    Assignees: Semiconductor Manufacturing International (Shanghai) Corp., Semiconductor Manufacturing International (Beijing) Corp.
    Inventor: Deyuan Xiao
  • Patent number: 8817435
    Abstract: A method for making a semiconductor device includes providing a substrate of a first conductivity type and having a surface region, forming a well region of a second conductivity type and having a first depth in the substrate, adding a gate dielectric layer overlying the surface region, adding a gate layer overlying the gate dielectric layer, forming a first LDD region of the first conductivity type and having a second depth within the well region, forming an emitter region of the second conductivity type within the first LDD region, and forming a second LDD region of the first conductivity type with the well region, a channel region separates the first and second LDD regions. The method further includes forming a source region being of the first conductivity type within the second LDD region and adding an output pad coupled to both the drain and emitter regions.
    Type: Grant
    Filed: November 7, 2011
    Date of Patent: August 26, 2014
    Assignee: Semiconductor Manufacturing International (Shanghai) Corp.
    Inventors: Chi Kang Liu, Ta Lee Yu, Quan Li
  • Patent number: 8249737
    Abstract: The present invention discloses a rapid thermal annealing method for a semiconductor device, which includes the steps of: establishing a ternary correspondence relationship among a device electrical parameter, an annealing temperature, and an STI distribution density; deriving an STI distribution density in a specific area of the semiconductor device and a target STI distribution density; determining whether the STI distribution density in the specific area is larger than the target STI distribution density; if the STI distribution density in the specific area is larger than the target STI distribution density, adding a virtual structure in the specific area to make the STI distribution density in the specific area equal to the target STI distribution density; and deriving from the ternary correspondence relationship a target annealing temperature corresponding to the target STI distribution density and performing an annealing process with the annealing temperature on the semiconductor device to achieve a tar
    Type: Grant
    Filed: February 18, 2010
    Date of Patent: August 21, 2012
    Assignee: Semiconductor Manufacturing International (Shanghai) Corp.
    Inventors: Jianhua Ju, Xianjie Ning