Patents Assigned to Semiconductor Manufacturing
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Patent number: 10763255Abstract: A semiconductor device has a first fin, a second fin, an isolation structure between the first fin and the second fin, a dielectric stage in the isolation structure, and a helmet layer over the dielectric stage. A top surface of the helmet layer is higher than a top surface of the isolation structure.Type: GrantFiled: August 14, 2018Date of Patent: September 1, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Cheng Ching, Shi-Ning Ju, Chih-Hao Wang
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Patent number: 10763178Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a gate stack over the substrate. The gate stack has a first upper portion and a first lower portion, and the first upper portion is wider than the first lower portion. The semiconductor device structure includes a spacer layer surrounding the gate stack. The spacer layer has a second upper portion and a second lower portion. The second upper portion is thinner than the second lower portion.Type: GrantFiled: November 20, 2018Date of Patent: September 1, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ming-Heng Tsai, Chun-Sheng Liang, Pei-Lin Wu, Yi-Ren Chen, Shih-Hsun Chang
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Patent number: 10763304Abstract: The present disclosure provides a semiconductor structure, including a memory region and a logic region adjacent to the memory region. The memory region includes a first Nth metal line, a first stop layer being disposed over a magnetic tunneling junction (MTJ) over the first Nth metal line, and a first (N+1)th metal via being disposed over the MTJ and surrounded by the first stop layer, the first (N+1)th metal via having a first height. The logic region includes a second Nth metal line, a second stop layer being disposed over an (N+1)th metal line, and a second (N+1)th metal via over the (N+1)th metal line and having a second height. N is an integer greater than or equal to 1 and the first height is greater than the second height. A method of manufacturing the semiconductor structure is also disclosed.Type: GrantFiled: April 23, 2018Date of Patent: September 1, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chern-Yow Hsu, Yuan-Tai Tseng, Shih-Chang Liu
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Patent number: 10763428Abstract: A magnetic tunnel junction is disclosed wherein the reference layer and free layer each comprise one layer having a boron content from 25 to 50 atomic %, and an adjoining second layer with a boron content from 1 to 20 atomic %. One of the first and second layers in each of the free layer and reference layer contacts the tunnel barrier. Each boron containing layer has a thickness of 1 to 10 Angstroms and may include one or more B layers and one or more Co, Fe, CoFe, or CoFeB layers. As a result, migration of non-magnetic metals along crystalline boundaries to the tunnel barrier is prevented, and the MTJ has a low defect count of around 10 ppm while maintaining an acceptable TMR ratio following annealing to temperatures of about 400° C. The boron containing layers are selected from CoB, FeB, CoFeB and alloys thereof including CoFeNiB.Type: GrantFiled: December 8, 2017Date of Patent: September 1, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Huanlong Liu, Yuan-Jen Lee, Jian Zhu, Guenole Jan, Po-Kang Wang
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Publication number: 20200274058Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate and a lower electrode over the semiconductor substrate. The semiconductor device structure also includes a first dielectric layer over the lower electrode, a second dielectric layer over the first dielectric layer, and a third dielectric layer over the second dielectric layer. Oxygen ions are bonded more tightly in the second dielectric layer than those in the first dielectric layer, and oxygen ions are bonded more tightly in the second dielectric layer than those in the third dielectric layer.Type: ApplicationFiled: May 14, 2020Publication date: August 27, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hai-Dang Trinh, Hsing-Lien Lin, Chii-Ming Wu, Cheng-Yuan Tsai
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Publication number: 20200273700Abstract: A method of fabricating semiconductor devices is provided. The method includes forming an interfacial layer on a substrate, and depositing a gate dielectric layer on the interfacial layer. The method also includes treating the gate dielectric layer with a first post deposition annealing (PDA) process. The method further includes depositing a first capping layer on the gate dielectric layer, and treating the gate dielectric layer by performing a post metal annealing (PMA) process on the first capping layer. In addition, the method includes removing the first capping layer, and treating the gate dielectric layer with a second PDA process. The method also includes forming a gate electrode layer on the gate dielectric layer.Type: ApplicationFiled: February 21, 2019Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chung-Liang CHENG, Ziwei FANG
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Publication number: 20200273794Abstract: A semiconductor device and a method of forming the same are provided. The semiconductor device includes a substrate, a gate stack and a first dielectric layer over the substrate, a source/drain (S/D) region, a contact, and a via. The first dielectric layer is laterally aside and over the gate stack. The S/D region is located in the substrate on sides of the gate stack. The contact penetrates through the first dielectric layer to electrically connect to the S/D region. The via penetrates through a second dielectric layer to connect to the contact. The via includes a conductive layer and an adhesion promoter layer on sidewalls of the conductive layer. The conductive layer is in contact with the contact.Type: ApplicationFiled: February 25, 2019Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Mrunal A. Khaderbad, Keng-Chu Lin, Sung-Li Wang, Shuen-Shin Liang, Yasutoshi Okuno, Yu-Yun Peng, Chia-Hung Chu
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Publication number: 20200273806Abstract: A semiconductor package includes an encapsulated semiconductor device, a backside redistribution structure, and a front side redistribution structure. The encapsulated semiconductor device includes an encapsulating material and a semiconductor device encapsulated by the encapsulating material. The backside redistribution structure is disposed on a backside of the encapsulated semiconductor device and includes a redistribution circuit layer and a first patterned dielectric layer. The redistribution circuit layer has a circuit pattern and a dummy pattern electrically insulated from the circuit pattern. The dummy pattern is overlapped with the semiconductor device from a top view of the semiconductor package. The first patterned dielectric layer is disposed on the redistribution circuit layer and includes a marking pattern disposed on the dummy pattern and revealing a part of the dummy pattern.Type: ApplicationFiled: February 26, 2019Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tsung-Hsien Chiang, Hsien-Ming Tu, Hao-Yi Tsai, Tin-Hao Kuo
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Publication number: 20200269382Abstract: A method of monitoring a chemical mechanical polishing (CMP) apparatus including an arm configured to swing a polishing component includes performing a CMP process; learning at least two positions of the polishing component during a normal swing motion of the polish component by an optical acceptor and a processing unit to determine a plurality of expected positions of the polish component; analyzing at least one real position of the polishing component at predetermined time points during the CMP process by the optical acceptor and the processing unit; inspecting whether an abnormal event occurs based on the analyzed real position of the polishing component and the expected positions by the processing unit during the CMP process; and determining whether to send an alarm and stop the CMP process based on the inspecting result.Type: ApplicationFiled: February 22, 2019Publication date: August 27, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Wei HUANG, Ren-Hao JHENG
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Publication number: 20200275552Abstract: A structure, a semiconductor device and a manufacturing method thereof are provided. The structure includes a core layer and a build-up stack disposed on the core layer. The core layer includes a first core dielectric layer, a second core dielectric layer, through vias, and a patterned conductive plate. The second core dielectric layer is disposed on the first core dielectric layer. The through vias cross the first core dielectric layer and the second core dielectric layer. The patterned conductive plate is disposed on the first core dielectric layer and is electrically insulated from the through vias. The build-up stack includes interconnected conductive patterns electrically connected to the through vias. A bottom surface of the patterned conductive plate is coplanar with an interface of the first core dielectric layer and the second core dielectric layer.Type: ApplicationFiled: February 26, 2019Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jiun-Yi Wu, Chien-Hsun Lee, Chen-Hua Yu, Chung-Shi Liu
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Publication number: 20200273695Abstract: A method for forming a semiconductor structure is provided. The method includes forming a dielectric structure on a semiconductor substrate, introducing a first gas on the dielectric structure to form first conductive structures on the dielectric structure, and introducing a second gas on the first conductive structures and the dielectric structure. The second gas is different from the first gas. The method also includes introducing a third gas on the first conductive structures and the dielectric structure to form second conductive structures on the dielectric structure. The first gas and the third gas include the same metal.Type: ApplicationFiled: February 22, 2019Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Mrunal A. KHADERBAD, Keng-Chu LIN, Shuen-Shin LIANG, Sung-Li WANG, Yasutoshi OKUNO, Yu-Yun PENG
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Publication number: 20200273964Abstract: A method of fabricating semiconductor devices is provided. The method includes forming a fin structure on a substrate, in which the fin structure includes a fin stack of alternating first and second semiconductor layers and forming recesses in the fin stack at source and drain regions. The method also includes etching the second semiconductor layers to form recessed second semiconductor layers, and forming third semiconductor layers on sidewalls of the recessed second semiconductor layers. The method further includes epitaxially growing source and drain structures in the recesses, removing the recessed second semiconductor layers to form spaces between the first semiconductor layers, and oxidizing the third semiconductor layers to form inner spacers. In addition, the method includes forming a gate structure to fill the spaces and to surround the first semiconductor layers.Type: ApplicationFiled: February 21, 2019Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chun-Hsiung LIN, Pei-Hsun WANG, Chih-Hao WANG, Kuo-Cheng CHING, Jui-Chien HUANG
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Publication number: 20200271860Abstract: A semiconductor package includes a photonic integrated circuit, an encapsulating material, and a redistribution structure. The photonic integrated circuit includes a coupling surface, a back surface opposite to the coupling surface and a plurality of optical couplers disposed on the coupling surface and configured to be coupled to a plurality of optical fibers. The encapsulating material encapsulates the photonic integrated circuit and revealing the plurality of optical couplers. The redistribution structure is disposed over the encapsulating material and the back surface of the photonic integrated circuit, wherein the redistribution structure is electrically connected to the photonic integrated circuit.Type: ApplicationFiled: February 26, 2019Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chih-Hao Chen, Chin-Fu Kao, Li-Hui Cheng, Szu-Wei Lu
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Publication number: 20200273910Abstract: A method for manufacturing a memory device includes forming a dielectric layer over a substrate. A bottom electrode via opening is formed in the dielectric layer. A bottom electrode is formed in the bottom electrode via opening. The bottom electrode is etched back. A selector is formed in the bottom electrode via opening and over the bottom electrode. A memory layer is formed over the selector. A top electrode is formed over the memory layer.Type: ApplicationFiled: February 22, 2019Publication date: August 27, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Jau-Yi WU
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Publication number: 20200273748Abstract: A method of forming a semiconductor device includes forming an ILD structure over a source/drain region, forming a source/drain contact in the ILD structure and over the source/drain region, removing a portion of the source/drain contact such that a hole is formed in the ILD structure and over a remaining portion of the source/drain contact, forming a hole liner lining a sidewall of the hole after removing the portion of the source/drain contact, and forming a conductive structure in the hole.Type: ApplicationFiled: May 11, 2020Publication date: August 27, 2020Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chia-Hao CHANG, Jia-Chuan YOU, Yu-Ming LIN, Chih-Hao WANG, Wai-Yi LIEN
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Publication number: 20200273718Abstract: A package structure and the manufacturing method thereof are provided. The package structure includes a semiconductor die, conductive through vias, an insulating encapsulant, and a redistribution structure. The conductive through vias are electrically coupled to the semiconductor die. The insulating encapsulant laterally encapsulates the semiconductor die and the conductive through vias, wherein the insulating encapsulant has a recess ring surrounding the semiconductor die, the conductive through vias are located under the recess ring, and a vertical projection of each of the conductive through vias overlaps with a vertical projection of the recess ring. The redistribution structure is electrically connected to the semiconductor die and the conductive through vias.Type: ApplicationFiled: February 25, 2019Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Li-Hui Cheng, Szu-Wei Lu, Ping-Yin Hsieh, Chih-Hao Chen
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Publication number: 20200272777Abstract: Electronic design automation (EDA) of the present disclosure, in various embodiments, optimizes designing, simulating, analyzing, and verifying of one or more electronic architectural designs for an electronic device. The EDA of the present disclosure identifies one or more electronic architectural features from the one or more electronic architectural designs. In some situations, the EDA of the present disclosure can manipulate one or more electronic architectural models over multiple iterations using a machine learning process until one or more electronic architectural models from among the one or more electronic architectural models satisfy one or more electronic design targets. The EDA of the present disclosure substitutes the one or more electronic architectural models that satisfy the one or more electronic design targets for the one or more electronic architectural features in the one or more electronic architectural designs to optimize the one or more electronic architectural designs.Type: ApplicationFiled: May 11, 2020Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yi-Lin CHUANG, Ching-Fang CHEN, Wei-Li CHEN, Wei-Pin CHANGCHIEN, Yung-Chin HOU, Yun-Han LEE
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Publication number: 20200273828Abstract: A semiconductor package includes a semiconductor die and a connection structure. The semiconductor die is laterally encapsulated by an insulating encapsulant. The connection structure is disposed on the semiconductor die, the connection structure is electrically connected to the semiconductor die, and the connection structure includes at least one first via, first pad structures, second vias, a second pad structure and a conductive terminal. The at least one first via is disposed over and electrically connected to the semiconductor die. The first pad structures are disposed over the at least one first via, wherein the at least one first via contacts at least one of the first pad structures. The second vias are disposed over the first pad structures, wherein the second vias contact the first pad structures.Type: ApplicationFiled: February 21, 2019Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ming-Yen Chiu, Shou-Yi Wang, Tsung-Shu Lin
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Publication number: 20200273797Abstract: A semiconductor device including an integrated circuit, a dielectric layer, a plurality of connecting terminals and at least one dummy conductor is provided. The integrated circuit has a plurality of connecting pads, and the dielectric layer is disposed thereon and partially exposes the plurality of the connecting pads by a plurality of openings defined therein. The plurality of the connecting terminals is disposed on the plurality of the connecting pads exposed by the plurality of the openings. The at least one dummy conductor is disposed on the dielectric layer and electrically isolated from the integrated circuit. A substantial topology variation is between the plurality of the connecting terminals and the at least one dummy conductor. A semiconductor package having the semiconductor device is also provided.Type: ApplicationFiled: May 10, 2020Publication date: August 27, 2020Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Feng-Cheng Hsu, Shin-Puu Jeng
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Publication number: 20200274495Abstract: A transformer-based Doherty power amplifier includes a main power amplifier path and an auxiliary power amplifier path which are connected in parallel. The main power amplifier path includes a main power amplifier, and the auxiliary power amplifier path includes an auxiliary power amplifier. The transformer-based Doherty power amplifier further includes a first linear network circuit or a second linear network circuit. The first linear network circuit is arranged at an input of the main power amplifier and is used to compensate for variations of an input capacitance of the main power amplifier, so as to improve the linearity of the main power amplifier. The second linear network circuit is arranged at an input of the auxiliary power amplifier and is used to compensate for variations of an input capacitance of the auxiliary power amplifier, so as to improve the linearity of the auxiliary power amplifier.Type: ApplicationFiled: December 31, 2019Publication date: August 27, 2020Applicant: Shanghai Huahong Grace Semiconductor Manufacturing CorporationInventors: Jiangchuan Ren, Ruofan Dai