Abstract: A plurality of gate stacks is formed over a substrate. The gate stacks are surrounded by a dielectric structure. A plurality of contact-line-blocking patterns is formed over the dielectric structure. The contact-line-blocking patterns are formed using three or more lithography masks. A plurality of trenches is formed in the dielectric structure. The contact-line-blocking patterns serve as protective masks for the dielectric structure to prevent trenches from being formed in portions of the dielectric structure underneath the contact-line-blocking patterns. The trenches are filled with a conductive material to form a plurality of contact lines of the SRAM device.

Abstract: A device includes a first transistor having a first source terminal, a first drain terminal, and a first gate terminal; and a second transistor having a second source terminal, a second drain terminal, and a second gate terminal. The second source terminal is coupled to the first gate terminal and the first source terminal is coupled to the second gate terminal. The first transistor has a first threshold voltage, and the second transistor has a second threshold voltage different from the first threshold voltage.

Abstract: A device is disclosed that includes a memory bit cell, a first word line, a pair of metal islands and a pair of connection metal lines. The first word line is disposed in a first metal layer and is electrically coupled to the memory bit cell. The pair of metal islands are disposed in the first metal layer at opposite sides of the word line and are electrically coupled to a power supply. The pair of connection metal lines are disposed in a second metal layer and are configured to electrically couple the metal islands to the memory bit cell respectively.

Abstract: A flash memory structure, a memory array and a fabrication method thereof are disclosed. In the flash memory structure, an erase gate structure is formed between two floating gates, and a word line structure is formed on an outer side of each of the two floating gates, with an oxide layer formed between the word line structure and the substrate. The flash memory structure can be fabricated with a simple process. The memory array employing the flash memory structure is capable of erase operations by means of a voltage applied on erase gate lines and of read operations by means of a voltage applied on word lines. This enables read operations at a lower voltage with less power consumed by the memory array. In addition, the memory array is more efficient and more durable.

Abstract: A semiconductor structure and a fabrication method are provided. The fabrication method includes: providing a substrate, containing first doping ions and including a pixel region for forming a pixel structure; forming a deeply doped region, in the photosensitive region of the substrate and containing second doping ions; forming a floating diffusion area in the floating diffusion region of the substrate and containing third doping ions; forming a gate structure on the substrate at the junction of the photosensitive region and the floating diffusion region; forming a sidewall film covering the gate structure and the substrate; forming a sidewall spacer; forming a first doped region in the floating diffusion region on one side of the gate structure; forming a metal connection layer on the first doped region; forming an interlayer dielectric layer on the substrate; and forming a source/drain contact plug in the interlayer dielectric layer.

Abstract: A method for forming metal contacts within a semiconductor device includes forming a first-layer contact into a first dielectric layer that surrounds at least one gate electrode, the first-layer contact extending to a doped region of an underlying substrate. The method further includes forming a second dielectric layer over the first dielectric layer and forming a second-layer contact extending through the second dielectric layer to the first-layer contact.

Abstract: Various methods are disclosed herein for fabricating non-planar circuit devices having strain-producing features. An exemplary method includes forming a fin structure that includes a first portion that includes a first semiconductor material and a second portion that includes a second semiconductor material that is different than the first semiconductor material. The method further includes forming a masking layer over a source region and a drain region of the fin structure, forming a strain-producing feature over the first portion of the fin structure in a channel region, removing the masking layer and forming an isolation feature over the strain-producing feature, forming an epitaxial feature over the second portion of the fin structure in the source region and the drain region, and performing a gate replacement process to form a gate structure over the second portion of the fin structure in the channel region.

Abstract: The present disclosure provides one embodiment of a method of forming an integrated circuit structure. The method includes forming a shallow trench isolation (STI) structure in a semiconductor substrate of a first semiconductor material, thereby defining a plurality of fin-type active regions separated from each other by the STI structure; forming gate stacks on the fin-type active regions; forming an inter-layer dielectric (ILD) layer filling in gaps between the gate stacks; patterning the ILD layer to form a trench between adjacent two of the gate stacks; depositing a first dielectric material layer that is conformal in the trench; filling the trench with a second dielectric material layer; patterning the second dielectric material layer to form a contact opening; and filling a conductive material in the contact opening to form a contact feature.

Abstract: The present disclosure describes exemplary configurations and arrangements for various intelligent diodes. The intelligent diodes of the present disclosure can be implemented as part of electrostatic discharge protection circuitry to protect other electronic circuitry from the flow of electricity caused by electrostatic discharge events. The electrostatic discharge protection circuitry dissipates one or more unwanted transient signals which result from the electrostatic discharge event. In some situations, some carrier electrons and/or carrier holes can flow from intelligent diodes of the present disclosure into a semiconductor substrate. The exemplary configurations and arrangements described herein include various regions designed collect these carrier electrons and/or carrier holes to reduce the likelihood these carrier electrons and/or carrier holes cause latch-up of the other electronic circuitry.

Abstract: A method of semiconductor wafer bonding and system thereof are proposed. A first alignment mark of a first semiconductor wafer is aligned with a second alignment mark of a second semiconductor wafer. A partial attachment is performed between the first semiconductor wafer and the second semiconductor wafer. A scanning is performed along a direction substantially parallel to a surface of the first semiconductor wafer. It is determined if a bonding defect of the partially attached first semiconductor wafer and the second semiconductor wafer exists.

Abstract: The present disclosure provides a method for forming a semiconductor device, including: forming a mask layer over a substrate, the mask layer containing an opening, exposing a surface portion of the substrate to form an exposed surface portion of the substrate; forming an insulation structure between the mask layer and the substrate, and in the opening; performing a thinning process on the insulation structure exposed by the opening to form a recess region on a top of the insulation structure; and forming a gate electrode over the insulation structure and covering a portion of the recess region.

Abstract: A semiconductor structure includes a semiconductor substrate having fins and gate structures on the fins. A protective layer is formed on top surfaces of the gate structures. Sidewall spacers are formed on side surfaces of the gate structures and the protective layer. A first dielectric layer is formed on the surface of the semiconductor substrate and covering the fins and the side surfaces of the sidewall spacers. A mask layer is formed on a portion of the first dielectric layer between adjacent gate structures. The mask layer and the protective layer are formed by etching a mask material layer. A second dielectric layer is formed on the first dielectric layer, the protective layer and the sidewall spacers and covering the side surfaces of the mask layer. Conductive vias are formed in the first dielectric layer between the adjacent gate structures and at both sides of the mask layer.

Abstract: A semiconductor device includes a substrate having a first conductivity type, a first well formed in the substrate and having a second conductivity type, a first diffusion region formed in the first well and having the first conductivity type, a first interlayer dielectric layer disposed over the first well and the first diffusion region, and a resistor wire formed of a conductive material and embedded in the first interlayer dielectric layer. The resistor wire overlaps the first diffusion region and at least partially overlaps the first well in plan view.

Abstract: A pattern sorting method used in OPC verification, comprises the following steps: obtaining sizes of comparison areas of patterns and extracting pattern boundaries; processing pattern boundaries; cutting off all the pattern edges outside comparison areas; setting grid sizes for filtering; setting directions for pattern boundaries; pattern division processing: dividing each pattern into 4 blocks of an equal size; recalculating the apexes of pattern boundaries in each block; implementing coordinate transformation for each block; calculating block characteristic values for each block; implementing rotating, upward and downward mirroring or leftward and rightward mirroring adjustment for blocks in accordance with corresponding block characteristic values; calculating overall characteristic values of patterns in accordance with various block characteristic values.

Abstract: A non-volatile memory (NVM) includes at least one memory unit region, each including a memory array and having first memory cells in the odd columns and second memory cells in the even columns. Corresponding to each memory unit region, the NVM includes a multiplexer including first bit line decoders and second bit line decoders, a comparator circuit including a first input terminal and a second input terminal, and a bias generation circuit generating a bias voltage. When reading a data information from a first memory cell, a first output voltage of the first memory cell is sent to the first input terminal and the bias voltage is sent to the second input terminal. When reading a data information from a second memory cell, a second output voltage of the second memory cell is sent to the second input terminal and the bias voltage is sent to the first input terminal.

Abstract: A method for processing the Library Exchange Format (LEF) diagram of a layout includes the following steps: Step 1, breaking the LEF diagram into multiple rectangular segments; Step 2, numbering all rectangular segments; and Step 3, combining rectangular segments to obtain a larger rectangular segment and replacing corresponding uncombined rectangular segments with the larger combined rectangular segment. The method reduces the data size of the LEF file and increase the data transmission efficiency of the LEF file.

Abstract: Generally, examples are provided relating to conductive features that include a barrier layer, and to methods thereof. In an embodiment, a metal layer is deposited in an opening through a dielectric layer(s) to a source/drain region. The metal layer is along the source/drain region and along a sidewall of the dielectric layer(s) that at least partially defines the opening. The metal layer is nitrided, which includes performing a multiple plasma process that includes at least one directional-dependent plasma process. A portion of the metal layer remains un-nitrided by the multiple plasma process. A silicide region is formed, which includes reacting the un-nitrided portion of the metal layer with a portion of the source/drain region. A conductive material is disposed in the opening on the nitrided portions of the metal layer.

Abstract: Methods of manufacturing a conductive feature and a package are provided. One of the methods includes the following steps. A seed layer is formed. A conductive pattern is formed over the seed layer. The seed layer and the conductive pattern include a same material. A dry etch process is performed to partially remove the seed layer exposed by the conductive pattern, to form a seed layer pattern. A plasma treatment process is performed on the seed layer pattern and the conductive pattern thereon, wherein the step of partially removing the seed layer and the step of performing the plasma treatment process are in-situ processes.

Abstract: Certain embodiments of a semiconductor device and a method of forming a semiconductor device comprise forming a high-k gate dielectric layer over a short channel semiconductor fin. A work function metal layer is formed over the high-k gate dielectric layer. A seamless metal fill layer is conformally formed over the work function metal layer.

Abstract: A semiconductor device and method of forming the same that includes forming a dielectric layer over a substrate and patterning a contact region in the dielectric layer, the contact region having side portions and a bottom portion that exposes the substrate. The method can also include forming a dielectric barrier layer in the contact region to cover the side portions and the bottom portion, and etching the dielectric barrier layer to expose the substrate. Subsequently, a conductive layer can be formed to cover the side portions and the bottom portion of the contact region and the conductive layer can be annealed to form a silicide region in the substrate beneath the bottom portion of the contact region, and the conductive layer can then be selectively removed on the side portions of the contact region.