Patents Assigned to Semiconductor Manufacturing
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Patent number: 11355635Abstract: A semiconductor structure includes a substrate, a first semiconductor fin, a second semiconductor fin, and a first lightly-doped drain (LDD) region. The first semiconductor fin is disposed on the substrate. The first semiconductor fin has a top surface and sidewalls. The second semiconductor fin is disposed on the substrate. The first semiconductor fin and the second semiconductor fin are separated from each other at a nanoscale distance. The first lightly-doped drain (LDD) region is disposed at least in the top surface and the sidewalls of the first semiconductor fin.Type: GrantFiled: January 13, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chun-Hsiung Tsai, Kuo-Feng Yu, Kei-Wei Chen
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Patent number: 11355637Abstract: A semiconductor device and method of manufacture are provided which help to support contacts while material is removed to form air gaps. In embodiments a contact is formed with an enlarged base to help support overlying portions of the contact. In other embodiments a scaffold material may also be placed prior to the formation of the air gaps in order to provide additional support.Type: GrantFiled: June 30, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ching-Feng Fu, Guan-Ren Wang, Yun-Min Chang, Yu-Lien Huang
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Patent number: 11355390Abstract: In some embodiments, the present disclosure relates to an integrated chip. The integrated chip may comprise a first metal line disposed over a substrate. A via may be disposed directly over a top of the first metal line and the via may comprise a first lower surface and a second lower surface above the first lower surface. A first dielectric structure may be disposed laterally adjacent to the first metal line and may be disposed along a sidewall of the first metal line. A first protective etch-stop structure may be disposed directly over a top of the first dielectric structure and the first protective etch-stop structure may vertically separate the second lower surface of the via from the top of the first dielectric structure.Type: GrantFiled: May 18, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shao-Kuan Lee, Hai-Ching Chen, Hsin-Yen Huang, Shau-Lin Shue, Cheng-Chin Lee
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Patent number: 11355701Abstract: An integrated circuit includes a substrate, a dielectric layer, an etch stop layer, a bottom electrode, a resistance switching element, and a top electrode. The dielectric layer is over the substrate. The etch stop layer is over the dielectric layer, in which the dielectric layer has a first portion directly under the etch stop layer. The bottom electrode penetrates through the etch stop layer and the dielectric layer, in which the dielectric layer has a second portion directly under the bottom electrode, and a top of the first portion of the dielectric layer is lower than a top of the second portion of the dielectric layer. The resistance switching element is over the bottom electrode. The top electrode is over the resistance switching element.Type: GrantFiled: August 24, 2020Date of Patent: June 7, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Hao Liao, Hsi-Wen Tien, Chih-Wei Lu, Pin-Ren Dai, Chung-Ju Lee
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Patent number: 11355587Abstract: A method includes providing a substrate, a semiconductor fin extending from the substrate, and a gate structure over the substrate and engaging the semiconductor fin; etching the semiconductor fin to form a source/drain trench; and epitaxially growing a source/drain feature in the source/drain trench, which includes epitaxially growing a first semiconductor layer having silicon germanium (SiGe); epitaxially growing a second semiconductor layer having SiGe above the first semiconductor layer; epitaxially growing a third semiconductor layer having SiGe over the second semiconductor layer; and epitaxially growing a fourth semiconductor layer having SiGe and disposed at a corner portion of the source/drain feature where the source/drain feature has a largest lateral dimension.Type: GrantFiled: November 30, 2020Date of Patent: June 7, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Shahaji B. More
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Patent number: 11355590Abstract: The current disclosure describes a vertical tunnel FET device including a vertical P-I-N heterojunction structure of a P-doped nanowire gallium nitride source/drain, an intrinsic InN layer, and an N-doped nanowire gallium nitride source/drain. A high-K dielectric layer and a metal gate wrap around the intrinsic InN layer.Type: GrantFiled: March 31, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Peter Ramvall, Matthias Passlack
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Patent number: 11355466Abstract: A package structure including at least one semiconductor die and a redistribution structure is provided. The semiconductor die is laterally encapsulated by an encapsulant, and the redistribution structure is disposed on the semiconductor die and the encapsulant and electrically connected with the semiconductor die. The redistribution structure includes signal lines and a pair of repair lines. The signal lines include a pair of first signal lines located at a first level, and each first signal line of the pair of first signal lines has a break that split each first signal line into separate first and second fragments. The pair of repair lines is located above the pair of first signal lines and located right above the break. Opposite ending portions of each repair line are respectively connected with the first and second fragments with each repair line covering the break in each first signal line.Type: GrantFiled: June 10, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Po-Yuan Teng, Hao-Yi Tsai, Kuo-Lung Pan, Sen-Kuei Hsu, Tin-Hao Kuo, Yi-Yang Lei, Ying-Cheng Tseng, Chi-Hui Lai
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Patent number: 11355491Abstract: Systems and methods for protecting a device from an electrostatic discharge (ESD) event are provided. A resistor-capacitor (RC) trigger circuit and a driver circuit are provided. The RC trigger circuit is configured to provide an ESD protection signal to the driver circuit. A discharge circuit includes a first metal oxide semiconductor (MOS) transistor and a second MOS transistor connected in series between a first voltage potential and a second voltage potential. The driver circuit provides one or more signals for turning the first and second MOS transistors on and off.Type: GrantFiled: August 14, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Shu-Yu Su, Jam-Wem Lee, Wun-Jie Lin
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Patent number: 11356625Abstract: An image sensor semiconductor device includes a first photodiode disposed in a semiconductor substrate and configured to generate charges in response to radiation, a first transistor disposed adjacent to the first photodiode, a floating diffusion region configured to store the generated charges, a reset transistor configured to reset the floating diffusion region, and a second transistor disposed over the substrate between the first photodiode and the reset transistor. The first transistor and the second transistor are configured to generate a first electric field and a second electric field, respectively, to move the charges generated by the first photodiode to the floating diffusion region.Type: GrantFiled: March 5, 2021Date of Patent: June 7, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Seiji Takahashi, Jhy-Jyi Sze
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Patent number: 11355461Abstract: An integrated fan-out package includes a die, an encapsulant, a seed layer, a conductive pillar, a redistribution structure, and a buffer layer. The encapsulant encapsulates the die. The seed layer and the conductive pillar are sequentially stacked over the die and the encapsulant. The redistribution structure is over the die and the encapsulant. The redistribution structure includes a conductive pattern and a dielectric layer. The conductive pattern is directly in contact with the seed layer and the dielectric layer covers the conductive pattern and surrounds the seed layer and the conductive pillar. The buffer layer is disposed over the redistribution structure. The seed layer is separate from the dielectric layer by the buffer layer, and a Young's modulus of the buffer layer is higher than a Young's modulus of the dielectric layer of the redistribution structure.Type: GrantFiled: June 29, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chi-Yang Yu, Chin-Liang Chen, Hai-Ming Chen, Kuan-Lin Ho, Yu-Min Liang
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Patent number: 11355410Abstract: A device includes a device layer comprising a first transistor; a first interconnect structure on a front-side of the device layer; and a second interconnect structure on a backside of the device layer. The second interconnect structure includes a first dielectric layer on the backside of the device layer; a contact extending through the first dielectric layer to a source/drain region of the first transistor; a conductive line electrically connected to the source/drain region of the first transistor through the contact; and a thermal dissipation path thermally connected to the device layer, the thermal dissipation path extending to a surface of the second interconnect structure opposite the device layer. The thermal dissipation path comprises a dummy via.Type: GrantFiled: July 13, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wen-Sheh Huang, Yu-Hsiang Chen, Chii-Ping Chen
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Patent number: 11355603Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming a fin structure on a substrate; forming a dummy gate over the fin structure; forming spacers on sides of the dummy gate; forming a doped region within the fin structure; replacing the dummy gate with a metal gate; replacing an upper portion of the metal gate with a first dielectric layer; forming a conductive layer directly on the doped region; replacing an upper portion of the conductive layer with a second dielectric layer; removing the first dielectric layer thereby exposing a sidewall of the spacer; removing an upper portion of the spacer to thereby expose a sidewall of the second dielectric layer; removing at least a portion of the second dielectric layer to form a trench; and forming a conductive plug in the trench.Type: GrantFiled: December 18, 2019Date of Patent: June 7, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wei-Hao Wu, Chia-Hao Chang, Chih-Hao Wang, Jia-Chuan You, Yi-Hsiung Lin, Zhi-Chang Lin, Chia-Hao Kuo, Ke-Jing Yu
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Patent number: 11355499Abstract: A static random access memory (SRAM) cell includes substrate, a first semiconductor fin, a first gate structure, a second semiconductor fin, and a second gate structure. The substrate has a first p-well and an n-well bordering the first p-well. The first semiconductor fin extends within the first p-well. The first gate structure extends across the first semiconductor fin and forms a first write-port pull-down transistor with the first semiconductor fin. The second semiconductor fin extends within the n-well. The second gate structure extends across the second semiconductor fin and forms a first write-port pull-up transistor with the second semiconductor fin. A channel region of the first write-port pull-down transistor has a higher doping concentration than a channel region of the first write-port pull-up transistor.Type: GrantFiled: December 19, 2019Date of Patent: June 7, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jordan Hsu, Yu-Kuan Lin, Shau-Wei Lu, Chang-Ta Yang, Ping-Wei Wang, Kuo-Hung Lo
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Patent number: 11355370Abstract: A method of monitoring a fluid includes: applying the fluid from within a nozzle to a surface of a wafer outside of the nozzle; emitting light, by a light source, from the nozzle to the surface; receiving light reflected from the surface by a light sensor and causing the reflected light to propagate into the nozzle; and determining whether a variation of the fluid occurs according to the reflected light.Type: GrantFiled: December 10, 2019Date of Patent: June 7, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Kai-Lin Chuang, Tsung-Chi Chen, Pei-Jung Chang, Chun-Wei Huang, Jun Xiu Liu
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Patent number: 11355474Abstract: A semiconductor package including an insulating encapsulation, an integrated circuit component, and conductive elements is provided. The integrated circuit component is encapsulated in the insulating encapsulation, wherein the integrated circuit component has at least one through silicon via protruding from the integrated circuit component. The conductive elements are located on the insulating encapsulation, wherein one of the conductive elements is connected to the at least one through silicon via, and the integrated circuit component is electrically connected to the one of the conductive elements through the at least one through silicon via.Type: GrantFiled: June 20, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Feng-Cheng Hsu, Shin-Puu Jeng
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Patent number: 11355463Abstract: In an embodiment, a structure includes a core substrate, a redistribution structure coupled, the redistribution structure including a plurality of redistribution layers, the plurality of redistribution layers comprising a dielectric layer and a metallization layer, a first local interconnect component embedded in a first redistribution layer of the plurality of redistribution layers, the first local interconnect component comprising conductive connectors, the conductive connectors being bonded to a metallization pattern of the first redistribution layer, the dielectric layer of the first redistribution layer encapsulating the first local interconnect component, a first integrated circuit die coupled to the redistribution structure, a second integrated circuit die coupled to the redistribution structure, an interconnect structure of the first local interconnect component electrically coupling the first integrated circuit die to the second integrated circuit die, and a set of conductive connectors coupled to aType: GrantFiled: September 14, 2020Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jiun Yi Wu, Chen-Hua Yu
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Patent number: 11355387Abstract: A method includes forming a dummy gate stack over a substrate; forming a gate spacer on a sidewall of the dummy gate stack; after forming the gate spacer, forming a source/drain region in the substrate and adjacent to the gate spacer; forming a first interlayer dielectric layer over the source/drain region and adjacent to the gate spacer; replacing the dummy gate stack with a metal gate stack; forming a protective layer over the metal gate stack and the gate spacer; after forming the protective layer, removing the first interlayer dielectric layer to expose a sidewall of the gate spacer and a sidewall of the protective layer; and forming a bottom conductive feature over the source/drain region.Type: GrantFiled: December 30, 2019Date of Patent: June 7, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jia-Chuan You, Chia-Hao Chang, Wai-Yi Lien, Yu-Ming Lin
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Patent number: 11355395Abstract: A semiconductor device includes several first cell rows extending in a first direction, each of the first cell rows having a first row height; several second cell rows extending in the first direction, each of the second cell rows having a second row height smaller than the first row height, wherein the first cell rows and the second cell rows are interlaced; a first cell arranged in a first row of the first cell rows; and at least one second cell arranged in at least one row of the second cell rows, wherein the at least one second cell abuts the first cell in a second direction different from the first direction, wherein the at least one second cell and at least one circuit component included in the first cell have the same operation configuration.Type: GrantFiled: May 22, 2020Date of Patent: June 7, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jerry Chang-Jui Kao, Hui-Zhong Zhuang, Li-Chung Hsu, Sung-Yen Yeh, Yung-Chen Chien, Jung-Chan Yang, Tzu-Ying Lin
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Patent number: 11356140Abstract: Circuits and methods for performing a clock and data recovery are disclosed. In one example, a circuit is disclosed. The circuit includes an FSM. The FSM includes: a first accumulator, a second accumulator, and a third accumulator. The first accumulator is configured to receive an input phase code representing a phase timing difference between a data signal and a clock signal at each FSM cycle, to accumulate input phase codes for different FSM cycles, and to generate a first order phase code at each FSM cycle. The second accumulator is coupled to the first accumulator and configured to accumulate the input phase codes and first order phase codes for different FSM cycles, and to generate a second order phase code at each FSM cycle. The third accumulator is coupled to the second accumulator and configured to accumulate the input phase codes and second order phase codes for different FSM cycles, and to generate a third order phase code at each FSM cycle.Type: GrantFiled: May 14, 2021Date of Patent: June 7, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Hsiang Lan, Cheng-Hsiang Hsieh
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Patent number: 11355927Abstract: A device is disclosed herein. The device includes an electrostatic discharge (ESD) detector, a bias generator, and an ESD driver including at least two transistors coupled to each other in series. The ESD detector is configured to detect an input signal and generate a detection signal in response to an ESD event being detected. The bias generator is configured to generate a bias signal according to the detection signal. The at least two transistors are controlled according to the bias signal and a logic control signal, and the input signal is applied across the at least two transistors.Type: GrantFiled: July 22, 2020Date of Patent: June 7, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Po-Lin Peng, Yu-Ti Su, Chia-Wei Hsu, Ming-Fu Tsai, Shu-Yu Su, Li-Wei Chu, Jam-Wem Lee, Chia-Jung Chang, Hsiang-Hui Cheng