Patents Assigned to Semilab SDI LLC
  • Photoluminescence mapping of passivation defects for silicon photovoltaics
    Patent number: 9685906
    Abstract: Methods for fast and accurate mapping of passivation defects in a silicon wafer involve capturing of photoluminescence (PL) images while the wafer is moving, for instance, when the wafer is transported on a belt in a fabrication line. The methods can be applied to in-line diagnostics of silicon wafers in solar cell fabrication. Example embodiments include a procedure for obtaining the whole wafer images of passivation defects from a single image (map) of photoluminescence intensity, and can provide rapid feedback for process control.
    Type: Grant
    Filed: June 26, 2014
    Date of Patent: June 20, 2017
    Assignee: Semilab SDI LLC
    Inventors: Jacek Lagowski, Marshall D. Wilson, Ferenc Korsos, György Nádudvari