Abstract: Method for calibrating a robot mounted on active magnetic bearings and having a gripper vertically positionable along a z axis and which is displaceable in a first magnetic bearing along an x axis and in a second magnetic bearing along a y axis includes dividing the first and second magnetic bearings into four mounting points; defining the setpoint center coordinates for the X, Y, Z axes and also the setpoint values for the angular positions ?, ? and transformation of the setpoint values into setpoint values for the vertical setpoint positions of the mounting points; specifying the actuating forces for the electromagnets of the mounting points; determining the current vertical positions for the mounting points; measuring the current vertical position of the mounting points and conversion into actual center coordinates; comparing the actual center coordinates with the setpoint center coordinates, determining the deviation and repeating the preceding steps.

Abstract: A device for particle free handling of substrates of micro technology within mini environments under clean room conditions works friction free and thus particle free. One component of the device is movable relative to an other component in at least the x-, y-, z-axes and a ?-direction and supported and driven along each of the axes and the direction contactless electromagnetically. Transmission of energy for bearing and driving the one component is effected contactless. The device includes at least one active component and at least one passive component. A movable active component may be guided on the fixed passive component by a magnet bearing, and a drive motor which rides with the active component may be coupled with an energy supply over an electromagnetic coupling.