Patents Assigned to SEMIROAD CO., LTD
  • Publication number: 20190138035
    Abstract: A device for measuring the concentration of a slurry solution according to an embodiment of the present invention includes a sensor part including a first sensor for measuring the conductivity of a solution, a second sensor for measuring an ultrasonic wave propagation velocity of the solution, and a third sensor for measuring the absorbance of the solution; and a concentration measurer configured to analyze the conductivity, ultrasonic wave propagation velocity, and absorbance input from the sensor part and measure the concentrations of hydrogen peroxide and a slurry in the solution in real time.
    Type: Application
    Filed: June 20, 2017
    Publication date: May 9, 2019
    Applicant: SEMIROAD CO., LTD
    Inventor: Hong Sung KIM