Abstract: The present invention relates to a direct method to convert fine and ultra fine silicon powder from polysilicon manufacturing sources such as fluid bed and free space reactors into densified granular forms. This conversion process is effected by the use of lasers of selective wavelengths from solid state diode or optically-pumped YAG sources to locally heat, melt and densify a controlled quantity of silicon powder, and comprises the steps of distributing dry silicon powder on an inert substrate, subjecting the silicon charge to a focused laser beam to realize melted and densified granular forms, and discharging the product. When adapted to high purity silicon powder, the end use for the densified silicon granular forms is primarily as feedstock for silicon-based semiconductor and photovoltaic manufacturing industries. The process, suitably modified, is adaptable to form other silicon body shapes and components.
Type:
Grant
Filed:
November 5, 2007
Date of Patent:
June 30, 2015
Assignee:
Semlux Technologies, Inc.
Inventors:
Alleppey V. Hariharan, Jagannathan Ravi
Abstract: A process for the recovery of silicon includes providing silicon-containing solids recovered from a silicon manufacturing process, said recovered silicon-containing solids being substantially free of semiconductor dopants; converting the recovered silicon-containing solids into gaseous silicon forms; subjecting to purification by minimal distillation; collecting the gaseous silicon forms as a condensed liquid of silicon-containing compounds; and utilizing the silicon-containing compounds for silicon deposition.
Type:
Grant
Filed:
August 4, 2009
Date of Patent:
June 30, 2015
Assignee:
SEMLUX TECHNOLOGIES, INC.
Inventors:
Alleppey V. Hariharan, Jagannathan Ravi
Abstract: A process for the recovery of silicon includes providing silicon-containing solids recovered from a silicon manufacturing process, said recovered silicon-containing solids being substantially free of semiconductor dopants; converting the recovered silicon-containing solids into gaseous silicon forms; subjecting to purification by minimal distillation; collecting the gaseous silicon forms as a condensed liquid of silicon-containing compounds; and utilizing the silicon-containing compounds for silicon deposition.
Type:
Grant
Filed:
August 4, 2009
Date of Patent:
June 23, 2015
Assignee:
SEMLUX TECHNOLOGIES, INC.
Inventors:
Alleppey V. Hariharan, Jagannathan Ravi