Abstract: The pump is provided with a plurality of pumping chambers and electrically activatable valves. An elastic membrane is arranged in each pumping chamber and divides the same into a first and a second chamber section. Each valve is connected to the second chamber section of a pumping chamber. When a pressure drop is applied over the valve and the valve is activated (i.e. opened), the pressure in the second chamber section changes, which causes the membrane to move, which in turn leads to a change of the volumes of both chamber sections. This e.g. allows to pump well-defined amounts of fluid from the chamber sections to a drug dispensing device.

Abstract: A pressure sensor is manufactured by joining two wafers, the first wafer comprising CMOS circuitry and the second being an SOI wafer. A recess is formed in the top material layer of the first wafer, which is covered by the silicon layer of the second wafer to form a cavity. Part or all of the substrate of the second wafer is removed to forming a membrane from the silicon layer. Alternatively, the cavity can be formed in the second wafer. The second wafer is electrically connected to the circuitry on the first wafer. This design allows to use standard CMOS processes for integrating circuitry on the first wafer.

Abstract: The resonator-based magnetic field sensor system has an oscillatory member as resonator, means for driving an electrical current through said resonator such that its resonance frequency is altered by an external magnetic field to be measured (measurand), and means for detecting or measuring said altered resonance frequency. A secondary excitation of the resonator is effected to determine the said altered resonance frequency from which the measurand can be deduced. In the preferred embodiment, the secondary excitation is included in a closed loop, thus creating an oscillator vibrating at the altered resonance frequency. Though it is known to use the oscillation amplitude of a suitable resonator for this purpose, the novel sensor system identifies and/or measures the frequency (not the amplitude) of the oscillation, which is a function of the magnetic field to be measured.