Patents Assigned to Sensor Measurement Technology
  • Patent number: 6250153
    Abstract: Sensors for use in sensing the level and temperature of a corrosive medium contained in a container. The sensors have particular use in the semiconductor manufacturing industry, however the sensors also have applications in the biotech, pharmaceutical, plating, chemical, petroleum, etc. industries. The sensors comprise first and second elongate, conductive sensor members, each of which has a longitudinal axis and is dimensioned to extend into the medium. The first and second sensor members each include a core that is made from a non-metallic, electrically resistive material having a plurality of non-metallic conductive fibers embedded therein. Each core has opposite ends and the fibers are oriented parallel to the longitudinal axis of the first and second sensor members and extend continuously substantially between the ends of the cores. Media level can be sensed by comparing the capacitance of the sensor members, which changes as the level of the media changes.
    Type: Grant
    Filed: August 24, 1998
    Date of Patent: June 26, 2001
    Assignee: Sensor Measurement Technology
    Inventors: Timothy R. Collins, Michael L. Henning