Patents Assigned to Seoul National University Research and Development Business Foundation (SNU R&DB FOUNDATI
  • NANOSTRUCTURE FABRICATION
    Publication number: 20100055620
    Abstract: Techniques for fabricating nanostructures are provided. In one embodiment a method includes forming a multilayer stack including at least one pair of a structural layer and a sacrificial layer on a substrate, patterning the multilayer stack in order to fabricate a nanostructure, and releasing the nanostructure from the patterned multilayer stack.
    Type: Application
    Filed: November 25, 2008
    Publication date: March 4, 2010
    Applicant: Seoul National University Research and Development Business Foundation (SNU R&DB FOUNDATI
    Inventor: Sunghoon Kwon