Abstract: The invention concerns a micromechanical element including a frame, a moving part rotating inside said frame, about an axis, two torsion beams connecting the moving part to said frame , aligned along the axis and provided with a portion of reinforced width, and stop members arranged on both sides of the reinforced portions, so as to limit the lateral movement of the moving part . According to the invention, the portions of reinforced width are integral with the frame , and the stop members are integral with the moving part.
Abstract: The invention concerns a micromechanical element (1) including a frame (10), a moving part (12) rotating inside said frame (10), about an axis AA, two torsion beams (14) connecting the moving part (12) to said frame (10), aligned along the axis AA and provided with a portion (15) of reinforced width, and stop members (16) arranged on both sides of the reinforced portions (15), so as to limit the lateral movement of the moving part (12). According to the invention, the portions (15) of reinforced width are integral with the frame (10), and the stop members (16) are integral with the moving part (12).
Abstract: A micromirror device (21) comprises an electrostatically actuable micromirror (25) and also a frame (27) and a base (9). The micromirror (25) is cardanically suspended in the base (9) via the frame (27) in that it is connected to the frame (27) via two articulated joints and the frame (27) is connected to the base (9) via two further articulated joints. In this way, the micromirror (25) can be actuated by application of an electrical voltage to correspondingly positioned electrodes, that is to say that one or both of the rotation axes defined by the two pairs of articulated joints are pivoted. The micromirror is then suspended in such a way that the two articulated joints defining one of the two rotation axes each comprise a torsion spring and the other two articulated joints defining the other of the two rotation axes each comprise a bending spring.
Type:
Application
Filed:
July 29, 2008
Publication date:
March 5, 2009
Applicant:
SERCALO Microtechnology Ltd.
Inventors:
Cornel MARXER, Peter Herbst, Michael Zickar, Wilfried Noell