Patents Assigned to Service Engineering Co. Ltd.
  • Plasma operation apparatus
    Patent number: 4876983
    Abstract: A plasma operation apparatus utilizes plasma generated by a microwave cooperative with a magnetic field as to perform a surface operation on a specimen such as semiconductor substrates, such as, for example, thin film deposition, etching, sputtering and plasma oxidation. The apparatus particularly takes advantage of electron cyclotron resonance and is suitable for performing highly efficient and high-quality plasma operations.
    Type: Grant
    Filed: January 19, 1988
    Date of Patent: October 31, 1989
    Assignees: Hitachi, Ltd., Service Engineering Co. Ltd.
    Inventors: Takuya Fukuda, Yasuhiro Mochizuki, Naohiro Momma, Shigeru Takahashi, Noboru Suzuki, Tadasi Sonobe, Kiyosi Chiba, Kazuo Suzuki