Patents Assigned to Set, Tosoh
  • Shield assembly for substrate processing chamber
    Patent number: 6780294
    Abstract: Disclosed is a shielding assembly for use within a substrate deposition processing chamber. The shielding assembly permits sputtering and evaporation processes to take place without the target material depositing upon the internal non-disposable surfaces of the chamber. The shielding assembly is of an improved construction which permits it to be uncoupled from an adapter plate without the need for removing the adapter plate from the deposition chamber.
    Type: Grant
    Filed: August 19, 2002
    Date of Patent: August 24, 2004
    Assignee: Set, Tosoh
    Inventors: Robert B. Hixson, Gary William Groshong, David Bruce Jordan, Jose Luis Gonzalez