Abstract: A capacitive pressure sensor including a concave base member coupled to a central base support. The base member has a flange extending from its rim having a substantially planar surface. A conductive, deformable diaphragm is stretched across the flange and held by a clamping ring having a surface complementary to the flange. A substantially planar electrode is positioned substantially parallel to and displaced by a predetermined distance from the diaphragm by an electrode support member coupled to the central base support.

Abstract: A system for generating a signal linearly related to the capacitive reactance of a sensor capacitor. The system includes an oscillator for providing an oscillatory signal characterized by a peak-to-peak voltage proportional to an applied control signal, at least one capacitive network and associated peak detecting network, and a feedback network. The capacitive network includes a drive capacitor and a sensor capacitor connected in series between the oscillator and a reference potential, and the peak detector includes means to generate a peak signal representative of the peak-to-peak voltage at the junction between its associated coupling and sensor capacitor. The feedback network produces the control signal for the oscillator whereby the peak amplitude of the voltage across the drive capacitor is constant.

Abstract: A pressure sensing device and method of construction therefor. The device includes at least two dielectric discs which are fused together at their peripheral boundary to form a hollow monolithic capsule having two nominally planar opposed inner surfaces. The opposed inner surfaces of the capsule are mutually separated by a uniform gap near the peripheral boundary and by a distance related to the difference in pressure interior and exterior to the capsule otherwise. Conductive films are disposed on opposed portions of the inner surfaces of the capsule. The device further includes a means for electrically coupling each of the conductive films to an associated terminal exterior to the capsule. The capacitance between these terminals is related to the above-mentioned pressure differential.

Abstract: A system for generating a signal which is a predetermined function of the capacitance of a sensor capacitor. The system comprises a sensing network including two series capacitors, at least one being the sensor capacitor. The system further comprises a switching network, and a feedback network coupled to the sensing and switching networks. The feedback network generates a feedback signal representative of the difference in charge stored on the series capacitors from a predetermined value. The switching network cyclically interconnects the feedback and sensor networks with the feedback signal and externally applied reference potentials whereby the average charge stored on the series capacitors over each cycle is substantially equal to the predetermined value. In some embodiments, the feedback signal is a linear function of the reciprocal of capacitance of the sensor capacitor.