Abstract: A capacitive sensor includes an elastic member extending about a central axis, having a central region, a peripheral region, a first side, and a second side. An overpressure stop member has an inner surface and an outer surface. The inner surface of the overpressure stop member has a contour adapted to limit deflection of the elastic member caused by a differential pressure between the two regions across the elastic member. The outer surface of the overpressure stop member has an first electrically conductive region. A second plate is spaced apart from the outer surface of the overpressure stop member, and being connected to the central region of the elastic member by a post, wherein the post transfers deformation of the elastic member caused by differential pressure across the elastic member to movement of the second plate along the central axis.