Patents Assigned to SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY
  • Publication number: 20240141547
    Abstract: The present invention relates to a preparation method of a P-type high-resistance and ultra-high-resistance Czochralski monocrystalline silicon substrate. According to the present invention, an oxygen concentration in a silicon wafer is controlled to match with a resistivity, so as to realize that a conductive type of the silicon substrate does not change after a device is manufactured, and that the silicon substrate has a high resistivity. The oxygen concentration and the resistivity in silicon crystal can be adjusted separately or together; and operation is flexible, and a yield of a high-resistance silicon crystal is greatly improved.
    Type: Application
    Filed: March 2, 2023
    Publication date: May 2, 2024
    Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY CHINESE ACADEMY OF SCIENCES
    Inventors: Xing Wei, Ming Hao Li, Rong Wang Dai, Zi Wen Wang, Zhong Ying Xue
  • Patent number: 11955373
    Abstract: The present invention provides a method for preparing a gallium oxide semiconductor structure and a gallium oxide semiconductor structure obtained thereby.
    Type: Grant
    Filed: September 29, 2019
    Date of Patent: April 9, 2024
    Assignee: Shanghai Institute of Microsystem And Information Technology, Chinese Academy of Sciences
    Inventors: Xin Ou, Tiangui You, Wenhui Xu, Pengcheng Zheng, Kai Huang, Xi Wang
  • Publication number: 20240096645
    Abstract: A SOI wafer is disclosed. The SOI wafer may be characterized by surface roughness of a top silicon layer of the SOI wafer is less than 4 ?, thickness uniformity of the top silicon layer is within ±1%, and a total number of particles on a surface of the top silicon layer of the SOI wafer, measured with setting of 37 nm of SPx detection threshold, is less than 100.
    Type: Application
    Filed: November 23, 2023
    Publication date: March 21, 2024
    Applicants: Zing Semiconductor Corporation, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Xing WEI, Rongwang DAI, Ziwen WANG, Minghao LI, Hongtao XU, Meng CHEN
  • Publication number: 20240069027
    Abstract: A use of nitrogen-doped carbon fluorescent quantum dots in preparation of aerobic glycolysis detection products is provided. The carbon-nitrogen fluorescent quantum dots are selected from one or more of C3N4 quantum dots, C2N quantum dots, and C3N quantum dots. The aerobic glycolysis detection products are reagents, based on a final volume of the reagents, the reagents comprise the carbon-nitrogen fluorescent quantum dots with a final concentration of 1 ?g/mL-1 mg/mL. The present disclosure realizes fluorescent labeling of NAD+ in living cells using the carbon-nitrogen fluorescent quantum dots, thus achieving fluorescent labeling and imaging of cells having aerobic glycolysis, which has the advantages of low cost, high efficiency, rapidity, and high accuracy.
    Type: Application
    Filed: December 28, 2021
    Publication date: February 29, 2024
    Applicants: SHANGHAI NINTH PEOPLE'S HOSPITAL, SHANGHAI JIAOTONG UNIVERSITY SCHOOL OF MEDICINE, SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: JIPENG LI, SIWEI YANG, GUQIAO DING, HUIFANG ZHOU, XIANQUN FAN
  • Patent number: 11881855
    Abstract: A superconducting integrated circuit design method based on placement and routing by different-layer JTLs comprises: cutting a bias line at a cell data interface of a cell library, and reserving a position of a via; placing and arranging cells on a logic cell layer according to a schematic circuit logic diagram; connecting clock lines of each of the cells by using a JTL and a splitter of the logic cell layer; and performing data connection on each of the cells by using JTLs of a transverse JTL routing layer and a longitudinal JTL routing layer which are not in the same layer as the logic cell layer, wherein the JTL of the transverse JTL routing layer is used as a transverse routing cell for data between the cells, the JTL of the longitudinal JTL routing layer is used as a longitudinal routing cell for data between the cells.
    Type: Grant
    Filed: March 22, 2021
    Date of Patent: January 23, 2024
    Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY CHINESE ACADEMY OF SCIENCES
    Inventors: Jie Ren, Ruo Ting Yang, Xiao Ping Gao, Zhen Wang
  • Patent number: 11876340
    Abstract: The present invention provides a laser, including: a medium, having a ground state, an intermediate state, and an excited state in ascending order of energy; an excitation system, configured to excite electrons in the medium from the ground state to the intermediate state; and an excitation laser, configured to drive electrons in the intermediate state at different spatial positions in the medium to the ground state through a stimulated emission process with a fixed phase relationship, to generate a laser with a shorter relative wavelength. Due to the use of an excitation laser to drive electrons from the intermediate state, the photons generated by the stimulated emission have coherence, thereby forming a laser.
    Type: Grant
    Filed: December 26, 2019
    Date of Patent: January 16, 2024
    Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: Shan Qiao, Zhinan Zeng, Xiaoyan Liang
  • Publication number: 20240004130
    Abstract: The present invention relates to a micro-nano structure sensitive to a laser beam in a specific direction, including a substrate, wherein an insulating layer is fixedly disposed on the substrate, the insulating layer is provided with two silicon nanowires parallel to each other and having the same shape and size, lead-out nanowires are arranged at both ends of each of the silicon nanowires and are connected with a potentiometer, and a near-field coupling effect occurs between the silicon nanowires and the substrate when laser light irradiates the silicon nanowires, and one silicon nanowire closer to a laser light source is completely suppressed and the other silicon nanowire farther away from the laser light source maintains brightness. The present invention enables precise detection of a laser signal at a specific angle and non-contact signal transmission in a specific direction.
    Type: Application
    Filed: December 1, 2020
    Publication date: January 4, 2024
    Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY CHINESE ACADEMY OF SCIENCES
    Inventors: Haiyang HUANG, Wei Li, Fengyuan Gan, Yi Zhou
  • Patent number: 11804821
    Abstract: The present disclosure provides a high frequency surface acoustic wave resonator and a method for making the same. The high frequency surface acoustic wave resonator includes: a high wave velocity supporting substrate, a piezoelectric film disposed on a top surface of the high wave velocity supporting substrate, and a top electrode disposed on a top surface of the piezoelectric film; a velocity of a body wave propagating in the high wave velocity supporting substrate is greater than a velocity of a target elastic wave propagating in the piezoelectric film. The conductivity of the high wave velocity supporting substrate is greater than 1E3 ?·cm. The high frequency surface acoustic wave resonator and the method for making the same of the present disclosure solve the problem that the operating frequency of the traditional surface acoustic wave resonator is low.
    Type: Grant
    Filed: April 28, 2020
    Date of Patent: October 31, 2023
    Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: Xin Ou, Shibin Zhang, Hongyan Zhou, Chengli Wang, Pengcheng Zheng, Kai Huang
  • Patent number: 11796738
    Abstract: The present invention provides a temperature-insensitive Mach-Zehnder interferometer, including: a first mode converter; a second mode converter, located on one side of the first mode converter and with a distance from the first mode converter; and a connecting arm, located between the first mode converter and the second mode converter, one end of the connecting arm is connected with the first mode converter, and the other end is connected with the second mode converter. The connecting arm includes a straight waveguide connecting arm. The temperature-insensitive Mach-Zehnder interferometer of the present invention can be configured to be insensitive to temperature by adjusting parameters such as the width and thickness of the connecting arm.
    Type: Grant
    Filed: January 3, 2019
    Date of Patent: October 24, 2023
    Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: Chao Qiu, Yingxuan Zhao, Fuwan Gan, Aimin Wu, Zhen Sheng, Wei Li
  • Patent number: 11788956
    Abstract: The present application provides a terahertz spectrum measurement system and a method for analyzing a terahertz spectrum of a substance, wherein the terahertz spectrum measurement system comprises: two terahertz quantum cascade lasers with their emission ports arranged oppositely; and a vacuum hood arranged between the emission ports of two terahertz quantum cascade lasers. The terahertz spectrum measurement system and the method for analyzing a terahertz spectrum of a substance realize a separate terahertz dual frequency comb while retaining the advantages of the on-chip dual frequency comb system, which solves the problem that the on-chip dual frequency comb cannot directly measure the terahertz spectra of substances.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: October 17, 2023
    Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Hua Li, Ziping Li, Wenjian Wan, Juncheng Cao
  • Publication number: 20230323561
    Abstract: The present invention provides a method of growing a single-crystal silicon, comprising: loading a batch of polysilicon material in a crucible of a furnace, heating the crucible to melt the polysilicon material into a mass of silicon melt, confirming a liquid surface of the mass of silicon melt, applying a superconducting magnetic field to the mass of silicon melt with a magnetic field generator and adjusting a position of the magnetic field generator to position a maximum point of the superconducting magnetic field within a predetermined range under the liquid surface, and dipping a seed crystal into the silicon melt, and pulling the seed crystal during rotation of the seed crystal to crystallize the single crystal under the seed crystal until forming an ingot of single-crystal silicon. Oxygen content in the ingot is controlled through positioning the maximum point of the superconducting magnetic field under the liquid surface.
    Type: Application
    Filed: December 28, 2022
    Publication date: October 12, 2023
    Applicants: Zing Semiconductor Corporation, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Yinfeng LI, Xing WEI, Minghao LI
  • Patent number: 11774433
    Abstract: A method for characterizing graphene on a platinum substrate, including: coating a methylene blue developing solution to a platinum substrate having a surface covered with graphene, so that the methylene blue developing solution reacts with hydrogen-containing gas under catalysis of platinum to yield colorless methylene white; after the pressure is restored, methylene white in the exposed area of platinum substrate will quickly turn blue when it is oxidized into methylene blue by reacting with oxygen in the air under catalysis of platinum. Thus, color difference can be formed to facilitate the observation of the graphene. The characterization method is highly reproducible and simple, and can be used to characterize graphene with a large area on a platinum substrate. The characterization method does not damage the graphene and platinum substrate, has no negative impact on the quality of graphene, and the platinum substrate can be recycled to reduce costs.
    Type: Grant
    Filed: September 25, 2022
    Date of Patent: October 3, 2023
    Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: He Kang, Guanghui Yu, Yanhui Zhang, Zhiying Chen
  • Publication number: 20230276638
    Abstract: The present invention provides a selector material, a selector unit and a preparation method thereof and a memory structure, wherein the selector material comprises at least one of Te, Se and S, that is, the selector material is selected from a simple substance such as Te, Se and S or compounds composed of any of these elements, further, the performance can be improved by doping with elements such as O, N, Ga, In, As and the like, or oxides, nitrides and carbides or other dielectric materials. The selector material in the present invention has the advantages of high turn-on current, simple material, fast switching speed, good repeatability and low toxicity when the selector material is used in the selector unit, which is beneficial to achieving high-density three-dimensional information storage.
    Type: Application
    Filed: October 29, 2020
    Publication date: August 31, 2023
    Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: Min ZHU, Jiabin SHEN, Shujing JIA, Zhitang SONG
  • Patent number: 11736969
    Abstract: A micro-power wireless access method and apparatus for the Internet of things for power transmission and transformation equipment involves a time synchronization process, a traffic channel access process, a control channel configuration information access process, and a control channel burst information access process. In the time synchronization process, an aggregation node determines a delay parameter and other parameters based on a timeslot in which traffic information randomly transmitted by a sensing terminal is located, and the sensing terminal adjusts transmission time of a corresponding frame based on the parameters. The traffic channel access process adopts a mode in which one-way reporting is mainly used, to minimize working time of a sensor. The present disclosure realizes limited two-way communication on a control channel, supports configuration of a sensor cycle, a threshold, and other parameters, and supports a retransmission mechanism on the control channel for important alarm information.
    Type: Grant
    Filed: November 3, 2021
    Date of Patent: August 22, 2023
    Assignees: State Grid Jiangsu Electric Power Co., Ltd. Research Institute, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, State Grid Jiangsu Electric Power Co., Ltd., State Grid Corporation of China
    Inventors: Jianhua Qin, Yongling Lu, Hong Liu, Chengbo Hu, Zhen Wang, Chao Yun, Min Zheng, Jun Jia, Guojiang Zhang, Lingling Xu, Fengbo Tao, Qiang Huang, Ziquan Liu, Xueqiong Zhu, Chong Tan
  • Patent number: 11679978
    Abstract: The present disclosure provides a method for preparing a multi-layer hexagonal boron nitride film, including: preparing a substrate; preparing a boron-containing solid catalyst, and disposing the boron-containing solid catalyst on the substrate; annealing the boron-containing solid catalyst to melt the boron-containing solid catalyst; feeding a nitrogen-containing gas and a protecting gas to an atmosphere in which the melted boron-containing solid catalyst resides, the nitrogen-containing gas reacts with the boron-containing solid catalyst to form the multi-layer hexagonal boron nitride film on a surface of the substrate. The method for preparing a multi-layer hexagonal boron nitride film can prepare a hexagonal boron nitride film having a lateral size in the order of inches and a thickness from several nanometers to several hundred nanometers on the surface of the substrate, providing a favorable basis for the application of hexagonal boron nitride in the field of two-dimensional material devices.
    Type: Grant
    Filed: October 14, 2019
    Date of Patent: June 20, 2023
    Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: Zhiyuan Shi, Tianru Wu, Guangyuan Lu, Xiujun Wang, Chao Zhang, Haomin Wang, Xiaoming Xie
  • Publication number: 20230178366
    Abstract: The present application provides a semiconductor substrate and a preparation process thereof. In the present application, the polysilicon layer includes the first polysilicon layer and the second polysilicon layer formed separately to generate the less stress, the more random grain orientation and the smaller grain size, maintain the high grain boundary density, and enhance the charge capture. By the combination of different deposition temperature and the combination of two cooling steps after each isothermal annealing treatment, the rate of contraction between the first polysilicon layer and the second polysilicon layer and the initial semiconductor substrate is decreased, and the thermal mismatch of semiconductor substrate is reduced. The stretch between the polysilicon layer and the initial semiconductor substrate can be reduced to prevent the warpage of the semiconductor substrate. Thereby, the stress generated during the growth process of the polysilicon layer can be further reduced.
    Type: Application
    Filed: December 1, 2022
    Publication date: June 8, 2023
    Applicants: Zing Semiconductor Corporation, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Xing WEI, Rongwang DAI, Ziwen WANG, Hongtao XU, Meng CHEN, Minghao LI
  • Publication number: 20230160868
    Abstract: A method for characterizing graphene on a platinum substrate, including: coating a methylene blue developing solution to a platinum substrate having a surface covered with graphene, so that the methylene blue developing solution reacts with hydrogen-containing gas under catalysis of platinum to yield colorless methylene white; after the pressure is restored, methylene white in the exposed area of platinum substrate will quickly turn blue when it is oxidized into methylene blue by reacting with oxygen in the air under catalysis of platinum. Thus, color difference can be formed to facilitate the observation of the graphene. The characterization method is highly reproducible and simple, and can be used to characterize graphene with a large area on a platinum substrate. The characterization method does not damage the graphene and platinum substrate, has no negative impact on the quality of graphene, and the platinum substrate can be recycled to reduce costs.
    Type: Application
    Filed: September 25, 2022
    Publication date: May 25, 2023
    Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: He KANG, Guanghui YU, Yanhui ZHANG, Zhiying CHEN
  • Publication number: 20230138958
    Abstract: The present disclosure relates to a method for treating a wafer surface. By controlling the gas composition at each stage of the treatment process, and corresponding processes of heating and annealing, and cooling and thinning by oxidation, the final wafer is enabled to have a surface roughness of less than 5 ?. This effectively reduces the cost of the final treatment process and has good application prospects.
    Type: Application
    Filed: January 27, 2022
    Publication date: May 4, 2023
    Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY CHINESE ACADEMY OF SCIENCES
    Inventors: Xing Wei, Rong Wang Dai, Zi Wen Wang, Zhong Ying Xue, Meng Chen, Hong Tao Xu
  • Publication number: 20230134308
    Abstract: A SOI wafer and a method of final processing the same is disclosed. Rapid thermal annealing comprises a first heating process in an atmosphere of a mixture of argon gas and hydrogen gas, volume of the hydrogen gas being less than 10% of whole volume of the mixture, and a first annealing process in an atmosphere of argon gas and optionally hydrogen gas, volume of the hydrogen gas being no greater than 10% of whole volume of the mixture. Long-time thermal annealing comprises a second heating process in an atmosphere of a mixture of argon gas and hydrogen gas, volume of the hydrogen gas being less than 10% of whole volume of the mixture, and a second annealing process in an atmosphere of argon gas and optionally hydrogen gas, volume of the hydrogen gas being no greater than 10% of whole volume of the mixture.
    Type: Application
    Filed: January 27, 2022
    Publication date: May 4, 2023
    Applicants: Zing Semiconductor Corporation, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Xing WEI, Rongwang DAI, Ziwen WANG, Minghao LI, Hongtao XU, Meng CHEN
  • Publication number: 20230137599
    Abstract: The present application provides a method of surface treatment of a SOI wafer comprising: providing a SOI wafer comprising a substrate, atop silicon layer and an insulating buried layer, wherein the insulating buried layer is located between the back substrate and the top silicon layer, and the top silicon layer has a surface roughness of larger than 10 ?; removing a native oxide layer from a surface of the top silicon layer by conducting a first isothermal annealing process at a first target temperature, wherein the first isothermal annealing process is under atmosphere of a mixture of argon and hydrogen; and planarizing the surface of the top silicon layer by conducting a second isothermal annealing process at a second target temperature, wherein the second target temperature is higher than the first target temperature, and the second isothermal annealing process is under atmosphere of argon.
    Type: Application
    Filed: January 27, 2022
    Publication date: May 4, 2023
    Applicants: Zing Semiconductor Corporation, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
    Inventors: Xing WEI, Rongwang DAI, Ziwen WANG, Minghao LI, Hongtao XU, Meng CHEN