Abstract: The present invention relates to a tri wavelength diffraction modulator (TWDM) and a method of tri wavelength diffraction modulation. The tri wavelength diffraction modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection anchored onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection anchored onto the stationary substrate. The diffraction modulator and the method for diffraction modulation are suitable to projection system.

Abstract: A method for processing a thin film micro device on a substrate includes: 1) depositing a carbon film on the substrate as a sacrificial layer; 2) photolithographically defining a first predetermined pattern in the carbon film; 3) etching an unwanted portion of the carbon film outside the first predetermined pattern; 4) depositing a structural film including a single or multiple layers of solid state materials; 5) photolithographically defining a second predetermined pattern in the structural film; 6) etching the discarded portion of the structural film outside the second predetermined pattern; 7) selectively removing the remaining portion of the sacrificial carbon film by using a selective etch process gas in a reactor chamber, so that the overlapped portion of the remaining structural element with the first predetermined pattern is suspended above an underneath cavity above the substrate.

Abstract: The present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation. The tri wavelength interference modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate. The inference modulator and the method for inference modulation are suitable to projection system.

Abstract: A polarizing cube includes a pair of identical and symmetric triangular prisms which sandwich a thin optical composite plate containing a planner array of reflective straight wires spaced apart in parallel as a built-in wire grid polarizer. All of its subcomponents and the polarizing cube itself are physically and optically symmetrical to one of its diagonal planes so as to provide improved integration and robustness for projection display application. The cubic configuration of the disclosed polarizer can be readily produced through common means and sequences typically used in semiconductor wafer fabrication processes, including photolithographic patterning, gap dielectric filling and planarization, and wafer thinning, bonding and cutting among others.

Abstract: The present invention discloses a capacitive MEMS switch on top of a semiconductor substrate containing a CMOS driving circuitry. The capacitive MEMS switch disclosed includes: 1) a semiconductor substrate containing a driving circuitry inside, and first and second conductors as well as a bottom electrode on top; 2) a suspended composite beam above and anchored onto the semiconductor substrate, containing a top electrode aligned to the bottom electrode with a first vertical distance, a top conductor, capped by a dielectric layer, having a first and second contact tips aligned with the first and second bottom conductors with a second vertical distance differentially smaller than the first vertical distance. The electrostatic attraction generated between the top electrode and the bottom electrode pulls the first and second contact tips in physical contact with and electrically connects the first and second bottom conductors through the top conductor.

Abstract: The embodiments of the present invention provide an integrated planar polarizing device and methods of fabrication. The device, in the order of incidence along an optical path of an incident light beam from back position to front position, comprises a planar array of micro mirrors, a quarter wave retarder film and a reflective polarization plate. The micro mirrors are regularly spaced-apart in an identical tilted angle ? relative to a base plane. The quarter wave retarder film is positioned between the micro mirrors and the reflective polarization plate.

Abstract: A micro electrical-mechanical system (MEMS) device comprises a suspended thin film microstructure which includes an anchoring portion adhered to the top surface of the substrate and a suspended portion above the top surface of the substrate. Having a base plane configured in parallel to the substrate, the suspended portion further includes a first recess portion spaced at a first vertical clearance with the substrate, the first vertical clearance being configured differentially smaller than a base clearance of the suspended portion outside the first recess portion.

Abstract: A capacitive MEMS gyroscope and a method of making the same are disclosed. The capacitive MEMS gyroscope comprises a semiconductor substrate and a suspended composite wheel.

Abstract: The disclosed LCOS device comprises a transparent composite plate, a planar liquid crystal cell, a base plate which contains an active matrix driving circuitry. In the basic embodiment, the planar liquid crystal cell comprises a conductive seal ring which encloses liquid crystal filling and connects the transparent conductive layer underneath the transparent composite plate with the base plate and the active matrix driving circuitry. In the extended embodiment, the base plate further incorporates a set of thru-substrate via and backside bond pads. The set of thru-substrate via electrically connect a set of input-output pads of the active matrix driving circuitry to the bottom bond pads underneath the base plate. In addition, the conductive seal ring electrically connects the transparent conductive film placed underneath the transparent front plane plate, preferably made of glass, to the active matrix driving circuitry on the base plate.

Abstract: A method of fabricating and encapsulating MEMS devices is disclosed, using least two carbon films as the dual sacrificial layers sandwiching a MEMS structural film which is anchored onto a substrate and covered by an encapsulating film containing a plurality of thru-film sacrificial release holes. The dual sacrificial carbon films are selectively removed via plasma-enhanced oxygen or nitrogen ashing through the thru-film sacrificial release holes for releasing the MEMS structural film inside a cavity formed between the encapsulating film and the substrate. The thru-film sacrificial release holes, preferably with a relative high asperity ratio, are then sealed off by depositing a hole-sealing film in a physical vapor deposition process or a chemical vapor deposition process or combination.

Abstract: The present invention relates to a liquid crystal on silicon imager. The imager includes a backplane substrate, a reflective polarization electrode array, a planar liquid crystal cell, a transparent conductive film and a transparent plate. The reflective polarization electrode array is placed onto the backplane substrate, consists of a plurality of reflective polarization electrodes, and a pattern of each of the reflective polarization electrodes is configured in a planar arrangement having regularly spaced and electrically isolated gaps in parallel to each other. The planar liquid crystal cell is placed above the reflective polarization electrode array. The transparent conductive film is placed above the planar liquid crystal cell. The transparent plate is placed on the transparent conductive film and facing incident light.

Abstract: A single-imager projection engine assembly includes a light source, a reflective polarization modulation imager, a reflective quarter wave composite plate, a projection lens system, and a PBS assembly which includes a first polarization beam splitting film and a second polarization beam splitting film in a V-notch pairing configuration. The first polarization beam splitting film reflects the illumination light in first polarization state to the reflective polarization modulation imager, while the second polarization beam splitting film and the reflective quarter wave composite plate in conjunction convert the illumination light in second polarization state passing through the first polarization beam splitting film to first polarization state and reflects the converted to the reflective polarization modulation imager. Combined illumination is modulated, polarization rotated and reflected by the reflective polarization modulation imager back to the PBS assembly for projection through the projection lens.

Abstract: A colored electrophoretic display includes a transparent substrate, a transparent conductive layer, a planar electrophoretic cell, and a backplane substrate in sequence of receiving an incident light. The backplane substrate includes a first block reflective electrode, a second block reflective electrode and a third block reflective electrode, tiled in a planar arrangement perpendicular to the incident light and electrically connected to a driving circuitry in the backplane substrate. The driving circuitry electrically drives the first block reflective electrode, the second block reflective electrode and the third block reflective electrode individually as well as the transparent conductive layer to form spatially colored reflective light modulation.

Abstract: A reflective color filter liquid crystal display, in the reverse order of receiving incident light, includes a backplane substrate, a reflective electrode layer, a planar liquid crystal cell, a transparent protective dielectric layer and a transparent plate. The transparent plate is adapted for receiving and transmitting the incident light. The planar liquid crystal cell is sandwiched between the reflective electrode layer and the transparent conductive film. The reflective electrode layer further includes a first band reflective electrode, a second band reflective electrode and a third band reflective electrode in a regularly tiled planar arrangement.

Abstract: An integrated opto-electronic device, a portable reflective projection system and a method for in situ monitoring and adjusting light illumination are provided. The device includes a reflective polarizing composite film (150) configured to receive a source light (210) at a desired non-normal incident angle (221), polarizes and reflects a first portion (211) of said source light (210) as polarized illumination light (16) at a reciprocal angle (222) to said desired non-normal incident angle (221); and a photovoltaic cell (180), adhered to an opposite side of said reflective polarizing composite film (150) to said source light (210), configured to receive a second portion (212) of said source light (210) that passes through said reflective polarizing composite film (150) and transform said second portion (212) to photogenerated charge. Unused illumination can be collected in order to re-store and reuse recovered energy.

Abstract: An optical projection engine device uses a symmetrical wire grid polarizing beam splitter (PBS) that splits incident illumination to a symmetrical pair of polarized light beams in two orthogonal polarization states, one by reflection and the other by transmission, for illuminating a pair of reflective modulation imagers respectively. In identical geometric configuration, the two synchronized reflective modulation imagers polarization modulate polarized light beams as received, and reflect them back towards the PBS, which through transmission and reflection respectively, combines and projects two modulated light beams through a projection lens system to form a pair of spatially overlapped illumination images of aligned pixels with the same image in two orthogonal polarization states on a projection screen. The device jointly provides improvement optical efficiency and expanded function to three dimensional stereoscopic displays.

Abstract: A power amplifier and a bridge circuit in a power amplifier, thereinto, the power amplifier includes a comparator, a bridge circuit and a low-pass filter. The comparator is adapted to receive a first analog signal, compare the first analog signal with a reference signal and output a square wave signal. The bridge circuit is adapted to amplify the square wave signal and output the amplified square wave signal. The low-pass filter is adapted to convert the amplified square wave signal into a second analog signal. The bridge circuit includes a first MEMS switch and a second MEMS switch. The first MEMS switch and the second MEMS switch turn on alternately when the polarity of the square wave changes, and output a first voltage signal or a second voltage signal respectively. The amplified square wave signal includes the first voltage signal and the second voltage signal output alternately.

Abstract: The present invention discloses an integrated single-panel projection engine (500) including a collimated light source (400), a main polarization beam splitter (200), a supporting polarization beam splitter (210), a reflective quarter wave plate (150), a mirror plate (160), an LCOS imager (100) and a projection lens system (300), which provides substantial improvement in optical efficiency of LCOS micro projection display.

Abstract: The present invention discloses a method of encapsulating a wafer level microdevice, which includes: fabricating a microdevice on top side of a first silicon wafer; depositing a first capping carbon film on the top side of the first silicon wafer; implementing a backside fabricating process of wafer from bottom side of the first silicon wafer by carrying the top side of the first silicon wafer through the first capping carbon film; removing the first capping carbon film by selective gaseous reaction with carbon; and encapsulating an encapsulation wafer onto the top side of the first silicon wafer. The present invention deposits and removes the first capping carbon film by means of chemical technology, thereby protecting the microdevice on the top side of the first wafer during implementing the backside fabricating process of wafer.

Abstract: A tri wavelength diffracting modulation (TWDM) element, a TWDM imager, and methods of temporally and spatially modulating by using the same are disclosed. The TWDM element includes first and second sets of movable reflective rigid plates under independent electrical actuation, provides four different spatial configurations for reflecting and selectively diffracting incident radiation of three distinguished wavelengths. The TWDM imager is formed with a plurality of the TWDM elements in a regularly spaced planar array configuration on a planar substrate. Incident visible light is spatially modulated by the TWDM imager, either in a time sequential mode or via spatial combination with help of an aligned color filter array.