Abstract: Various embodiments for an adjustable flow nozzle system having a manifold with a plurality of adjustable flow nozzles in which the flow rate of each adjustable flow nozzle may be individually adjusted are described herein.
Type:
Grant
Filed:
January 28, 2020
Date of Patent:
December 28, 2021
Assignee:
SHELLBACK SEMICONDUCTOR TECHNOLOGY, LLC
Inventors:
Christian K. Forgey, Alexander Trufanov, Joshua A. Levinson, Darren O. O'Reilly