Abstract: An anodized titanium material includes a titanium base material and an anodized titanium layer. The anodized titanium layer is provided on a surface of the titanium base material. The anodized titanium layer includes a porous first anodized titanium layer. The anodized titanium layer has a withstand voltage at 25° C. of 500 V or more, a Vickers hardness of 200 or more, a film thickness of 20 ?m or more and less than 80 ?m, an arithmetic average roughness Ra of a surface of less than 1.6 ?m, and a maximum height roughness Rz of the surface is less than 6.3 ?m. In both of a section perpendicular to a thickness direction of the first anodized titanium oxide layer and the surface, no pore sections having a shape capable of including a circle having a diameter of 0.5 ?m or more are observed.
Type:
Application
Filed:
February 8, 2021
Publication date:
July 8, 2021
Applicants:
Yamaguchi Prefectural Industrial Technology Institute, Shimonoseki Mekki Co., Ltd., Tokyo Electron Limited