Patents Assigned to SHINIKAWA LTD.
  • Patent number: 10118246
    Abstract: Provided is a bonding apparatus including a bonding stage 83 for heating a substrate (lead frame) 61 placed on the upper surface thereof or a semiconductor die 63 mounted on the substrate (lead frame) 61, an imaging device 20 arranged above the bonding stage 83 to image the substrate 61 placed on the bonding stage 83 or the semiconductor die 63 mounted on the substrate 61, and a standing wave generating device 35 for generating an ultrasonic standing wave in the space between the upper surface of the bonding stage 83 and the imaging device 20. This improves the accuracy of image position detection by the imaging device with a simple structure.
    Type: Grant
    Filed: June 26, 2017
    Date of Patent: November 6, 2018
    Assignee: SHINIKAWA LTD.
    Inventors: Shigeru Hayata, Hiroya Yuzawa, Yusuke Matsuki