Abstract: An object of the present invention is to provide a wafer transfer robot mount/demount cart for simply mounting and demounting a wafer transfer robot which is linearly, substantially horizontally reciprocated in a wafer transfer apparatus to transfer wafers. A pair of mount/demount cart-side rails 9 which can be connected to a pair of wafer transfer apparatus-side guide rails mounted inside a wafer transfer apparatus D is mounted on a raised portion 5 of the mount/demount cart A. A joint rail S is mounted in a gap between the pair of wafer transfer apparatus-side rails and the pair of mount/demount cart-side rails 9 so as to slide a wafer transfer robot R onto the pair of mount/demount cart-side rails 9 via the joint rail S.

Abstract: In a vibratory conveyor which includes a trough for transporting objects, an exciting mechanism for vibrating the trough in a horizontal direction and a supporting mechanism for supporting the trough so as to be vibratile in the horizontal direction, the exciting mechanism is a linear motor, one of the primary and secondary sides of the linear motor is fixed to the trough and the other is facing to the one side with a predetermined gap and so arranged as to be vibratile relative to the one side.

Abstract: The invention disclosed is an elliptical vibratory apparatus including a first controller which includes at least a first phase shifter, a first high-gain amplifier and a first saturating element; a first power amplifier for amplifying an output of the first controller; a first vibratory exciter receiving an output of the first power amplifier for generating a horizontal vibrational force in a horizontal direction; a horizontal vibrational system of an elliptical vibratory machine receiving said horizontal vibrational force; a vibrational displacement detector for detecting a horizontal displacement of a movable part of the elliptical vibratory machine in the horizontal direction, the output of the vibrational detector being supplied to both the input of the first controller and the input of a second controller; the second controller including at least a second phase shifter, a second high-gain amplifier and a second saturating element; a second power amplifier for amplifying an output of the second controlle

Abstract: A strong magnetic thrust force type actuator includes two types of actuators. In accordance with a first type of actuator, a permanent magnet is inserted into respective grooves formed within the facing portions of the primary magnetic member. When the insulated wires are activated in connection with the primary magnetic member, a magnetic flux flows toward the facing portions of one magnetic pole, these facing portions are arranged at the S-pole sides of the permanent magnets, the magnetic flux then emerges from the N-pole sides of the permanent magnets, and flows into the facing portions of the secondary magnetic member. This magnetic flux then flows from the secondary magnetic member into the facing portions of the other magnetic pole disposed at the S-pole sides of the permanent magnets, and then flows through the permanent magnets so as to make a complete magnetic flux loop.

Abstract: A strong magnetic thrust force type actuator includes a first type of actuator, the permanent magnets of which are inserted between plate members of the primary magnetic member. When a coil disposed upon the primary magnetic member is energized magnetic flux flows from a facing portion formed with a secondary magnetic member to one of the plate members, and then, to an adjacent plate member through one of the permanent magnets. Within this adjacent plate member, additional magnetic flux flows therein from another adjacent plate member through another permanent magnet.

Abstract: An A.C. relay system for making and breaking an A.C. power line utilizing an electromagnetic relay having a coil for opening and closing the mechanical switching contacts, a bilateral gated semiconductor such as a triac connected across the contacts, and a control circuit for switching the relay and triac in proper sequence is disclosed. The control circuit comprises a sequence control unit, a phase detector, a triac firing unit and a relay energizing unit. Upon actuation of the sequence control unit, the triac firing unit first fires the triac and then the relay energizing unit energizes the coil to close the mechanical contacts. To break the A.C. power line, the sequence control unit first de-energizes the relay energizing unit and then after a suitable time interval de-energizes the triac firing unit to cut off the gate signal, the triac being turned off when the load current on the power line is below a triac holding current.