Patents Assigned to Shipley
  • Dyed photoresists and methods and articles of manufacture comprising same
    Publication number: 20060204892
    Abstract: The present invention provides new photoresist compositions that comprise a resin binder, a photoactive component, particularly an acid generator, and a dye material that contains one or more chromophores that can reduce undesired reflections of exposure radiation. Preferred dye compounds are polymeric materials that include one or more chromophores such as anthracene and other polycyclic moieties that effectively absorb deep UV exposure radiation.
    Type: Application
    Filed: May 3, 2006
    Publication date: September 14, 2006
    Applicant: Shipley
    Inventors: James Mori, James Thackeray, Roger Sinta, Rosemary Bell, Robin Miller-Fahey, Timothy Adams, Thomas Zydowsky, Edward Pavelchek, Manuel doCanto
  • Antihalation compositions
    Publication number: 20060110682
    Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
    Type: Application
    Filed: January 9, 2006
    Publication date: May 25, 2006
    Applicant: Shipley
    Inventors: James Thackeray, George Orsula