Patents Assigned to Shipley
  • Patent number: 6054061
    Abstract: A process and composition for treating a metal surface to increase its surface roughness for subsequent adhesion to a polymer layer. The composition comprises hydrogen peroxide, inorganic acid, an amine free of a surfactant group and optionally, a corrosion inhibitor. The composition is characterized by elimination of a surfactant from solution.
    Type: Grant
    Filed: December 11, 1997
    Date of Patent: April 25, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: Martin Bayes, Peter W. Hinkley
  • Patent number: 6051358
    Abstract: An unsymetrical photoactive compound having the formula ##STR1## where Z is hydrogen, a hydrocarbon having from 1 to 8 carbon atoms, or halogen; D is hydrogen or diazo-oxo-naphthalene-sulfonyl; n is equal to 1 to 4; R.sub.1, R.sub.5 and R.sub.6 are independently a hydrocarbon or halogen; R.sub.2 is the same as R.sub.1 or hydrogen; each R.sub.3 is the same as R.sub.2, hydroxyl or --OD; and each R.sub.4 is the same as R.sub.2 or another substituent provided that at least one R.sub.2, or one or both R.sub.4 is other than hydrogen, at least 2 Ds are diazo-oxo-sulfonyl group and at least 50 mole percent of the mixture conforms to the formula where n equals 1. The compounds of the invention are suitable for formation of storage stable photoresist compositions.
    Type: Grant
    Filed: November 4, 1997
    Date of Patent: April 18, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: Anthony Zampini, Harold F. Sandford
  • Patent number: 6048672
    Abstract: The invention includes use of a positive chemically amplified photoresist composition that produces a strong photogenerated acid. The resist is coated onto a metal substrate that has been subjected to a stringent bake step, e.g. heating of the substrate at about at least 140.degree. C. for more than 60 seconds. The combined use of strong photogenerated acid and stringent pre-coating substrate bake provides highly resolved resist relief images, including on metal substrates.
    Type: Grant
    Filed: February 20, 1998
    Date of Patent: April 11, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: James F. Cameron, Martha M. Rajaratnam, Roger F. Sinta, James W. Thackeray
  • Patent number: 6042997
    Abstract: The present invention provides novel copolymers and photoresist compositions that contain such copolymers as a resin binder component. Preferred copolymers include three distinct repeating units: 1) units that contain acid-labile groups; 2) units that are free of both reactive and hydroxy moieties; and 3) units that contribute to aqueous developability of a photoresist containing the copolymer as a resin binder. Photoresists of the invention exhibit surprising lithographic improvements including substantially enhanced plasma etch resistance and isolated line performance as well as good dissolution rate control.
    Type: Grant
    Filed: January 23, 1998
    Date of Patent: March 28, 2000
    Assignees: IBM Corporation, Shipley Company, L.L.C.
    Inventors: George G Barclay, Michael F. Cronin, Ronald A. Dellaguardia, James W. Thackeray, Hiroshi Ito, Greg Breyta
  • Patent number: 6039859
    Abstract: The invention relates to a conductive dispersions used for diverse purposes such a base for electroplating nonconductors. The dispersion are characterized by use of a stabilizing quantity of a stabilizer having repeating alylkene oxide groups and a hydrophilic--lipophilic balance in excess of 12. It has been found that the stabilizers utilized in the subject compositions does result in a significant loss of conductivity in coatings formed from the dispersion.
    Type: Grant
    Filed: May 20, 1998
    Date of Patent: March 21, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: Wade Sonnenberg, Patrick J. Houle, Thong B. Luong, James G. Shelnut, Gordon Fisher
  • Patent number: 6037107
    Abstract: The invention provides photoresist compositions comprising a resin binder having acid labile blocking groups requiring an activation energy in excess of 20 Kcal/mol. for deblocking, a photoacid generator capable of generating a halogenated sulfonic acid upon photolysis and optionally, a base additive. It has been found that linewidth variation is substantially reduced when using the halogenated sulfonic acid generator in a process involving a high temperature post exposure bake.
    Type: Grant
    Filed: August 28, 1997
    Date of Patent: March 14, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: James W. Thackeray, James F. Cameron, Roger F. Sinta
  • Patent number: 6036835
    Abstract: A microetch composition for a circuit board containing sulfuric acid in combination with a carboxylic acid having 2 to 6 carbon atoms, wherein the volume of the carboxylic acid is preferably greater than the amount of sulfuric acid. The method discloses the contacting of a electrically conductive polymer with the microetch composition disclosed above to expose copper underlying the electrically conductive polymer.
    Type: Grant
    Filed: September 24, 1997
    Date of Patent: March 14, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: Wade Sonnenberg, John J. Bladon, David Oglesby, Jeffrey P. Burress
  • Patent number: 6033830
    Abstract: The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition (ARC), particularly for deep UV applications. The ARCs of the invention in general comprise a crosslinker and novel ARC resin binders that effectively absorb reflected deep UV exposure radiation.
    Type: Grant
    Filed: November 7, 1997
    Date of Patent: March 7, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: Roger F. Sinta, Timothy G. Adams, James Michael Mori
  • Patent number: 6017967
    Abstract: The invention relates to a metal sulfide dispersion used for electroplating nonconductors such as substrates used for the formation of a printed circuit board. A printed circuit board made using the dispersion could have metallized through-holes comprising electrodeposited copper on the walls of the holes with an adsorbed layer of metal sulfide particles between the circuit board base material and the copper on the walls of the through-holes. The metal sulfide is characterized by spherical particles having a mean diameter of less than 100 nanometers and a particle size distribution where less than 10 percent of the particles within the dispersion have a diameter twice that of the mean diameter of all particles within the dispersion.
    Type: Grant
    Filed: April 1, 1996
    Date of Patent: January 25, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: Egon Matijevic, Matthias Schultz, Wade Sonnenberg, John J. Bladon, Patrick J. Houle, Thong B. Luong
  • Patent number: 5976770
    Abstract: The present invention provides new photoresist compositions that comprise a resin binder, a photoactive component, particularly an acid generator, and a low molecular weight anthracene dye compounds. It has been found that these dye compounds can significantly reduce or even eliminate undesired reflections of exposure radiation, particularly deep U.V. exposure radiation such as 248 nm, as well as function as effective sensitizer compounds, enabling effective imaging at higher wavelengths, particularly I-line exposures.
    Type: Grant
    Filed: January 15, 1998
    Date of Patent: November 2, 1999
    Assignee: Shipley Company, L.L.C.
    Inventors: Roger F. Sinta, Thomas M. Zydowsky
  • Patent number: 5968712
    Abstract: The present invention provides radiation sensitive compositions and methods that comprise novel means for providing relief images of enhanced resolution. In one aspect the invention provides a method for controlling diffusion of photogenerated acid comprising adding a polar compound to a radiation sensitive composition and applying a layer of the composition to a substrate; exposing the composition layer to activating radiation whereby a latent image is generated comprising a distribution of acid moieties complexed with the polar compound; and treating the exposed composition layer to provide an activating amount of acid.
    Type: Grant
    Filed: November 12, 1993
    Date of Patent: October 19, 1999
    Assignee: Shipley Company, L.L.C.
    Inventors: James W. Thackeray, Angelo A. Lamola
  • Patent number: 5948312
    Abstract: A system and process for decontaminating solder which includes a linking pipe with an internal heater in the path of solder flow into a skim tank and transfer pump and valves for moving decontaminated solder from the skim tank into a standby tank which in turn is able to provide decontaminated solder to a solder machine or back to the skim tank in order to test the system.
    Type: Grant
    Filed: December 4, 1997
    Date of Patent: September 7, 1999
    Assignee: Shipley Company, L.L.C.
    Inventor: Donald P. Gates
  • Patent number: 5945516
    Abstract: A method for converting a kinetically stable multiester of a naphthoquinone and an o-quinone diazide sulfonyl halide to a thermodynamically stable compound. The method comprises the steps of dissolving a phenol having at least two free phenolic hydroxyl groups and an o-naphthoquinone diazide sulfonyl halide in an aprotic solvent in the presence of a strong base, there being at least one mole of said naphthoquinone diazide sulfonyl halide per mole of phenol, reacting said phenol with said o-napthoquinone diazide sulfonyl halide until essentially of said o-naphthoquinone diazide sulfonyl halide is reacted with said polyhydroxy phenol, and following completion of said reaction, permitting the reaction product to remain in said solvent for a period of time of at least 15 minutes before recovering said photoactive compound The photoactive compound formed by the process is suitable for the formation of photoresists and is less apt to precipitate from solution during storage.
    Type: Grant
    Filed: May 20, 1998
    Date of Patent: August 31, 1999
    Assignee: Shipley Company, L.L.C.
    Inventors: Harold F. Sandford, Anthony Zampini
  • Patent number: 5939511
    Abstract: The invention is directed to purification of phenolic resins and to a process for preparing an organic photoresist coating composition. The process comprises reacting one or more phenols to form a crude phenolic resin. The crude phenolic resin formed is then separated from its reaction mixture and dissolved in an aqueous insoluble organic solvent in an organic solvent that is a solvent for the photoresist coating composition. The solution so formed is then mixed with an aqueous phase to extract water soluble impurities from the resin solution into the aqueous phase. Finally, the purified resin solution is further diluted with additional photoresist solvent.
    Type: Grant
    Filed: April 8, 1998
    Date of Patent: August 17, 1999
    Assignee: Shipley Company, L.L.C.
    Inventors: Anthony Zampini, Suzanne M. Coley
  • Patent number: 5939236
    Abstract: The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition, particularly for deep UV applications. The antireflective compositions of the invention comprise a photoacid generator that is activated during exposure of an overcoated photoresist. Antireflective compositions of the invention can significantly reduce undesired footing of an overcoated resist relief image.
    Type: Grant
    Filed: February 7, 1997
    Date of Patent: August 17, 1999
    Assignee: Shipley Company, L.L.C.
    Inventors: Edward K. Pavelchek, Manuel DoCanto
  • Patent number: 5932389
    Abstract: This invention relates to alternating and block copolymer resins of uniform and controlled chain length and methods for preparing the same. The alternating copolymer resins are formed from the reaction of a bisoxymethylphenol, a reactive phenolic compound and a monooxymethylphenol. The alternating copolymer may then be further reacted with a second reactive compound in the presence of an aldehyde to form the substantially blocked copolymer. The resins of the invention are characterized by a low molecular weight distribution. The resins are useful for the formulation of high resolution photoresist materials.
    Type: Grant
    Filed: February 20, 1998
    Date of Patent: August 3, 1999
    Assignee: Shipley Company, L.L.C.
    Inventor: Anthony Zampini
  • Patent number: 5919597
    Abstract: Methods are provided to prepare photoresists without isolation of various components, i.e. in a "one-pot" procedure. Preferred one-pot preparation methods of the invention include preparing a photoresist resin binder in a selected photoresist solvent and, without isolation of the resin binder from the solvent, adding a photoactive component and any other desired photoresist materials to the resin binder in solution to thereby provide a liquid photoresist composition in the solvent in which the resin binder was prepared. The invention also provides novel methods for synthesizing resist resin binders, particularly phenolic polymers that contain phenolic OH groups covalently bonded to another moiety such as acid labile groups or inert blocking groups.
    Type: Grant
    Filed: October 30, 1997
    Date of Patent: July 6, 1999
    Assignees: IBM Corporation of Armonk, Shipley Company, L.L.C. of Marlborough
    Inventors: Roger F. Sinta, Uday Kumar, George W. Orsula, James I. T. Fahey, William R. Brunsvold, Wu-Song Huang, Ahmad D. Katnani, Ronald W. Nunes, Mahmoud M. Khojasteh
  • Patent number: 5917024
    Abstract: A photoresist composition comprising an alkali soluble resin and the reaction product of an ortho-naphthoquinone diazide sulfonic acid ester and a vinyl ether. In use, the photoresist is characterized by having at least a portion of the hydroxyl groups on the alkali soluble resin reacted with the photoactive compound and then deblocked by acid generation.
    Type: Grant
    Filed: February 20, 1998
    Date of Patent: June 29, 1999
    Assignee: Shipley Company, L.L.C.
    Inventors: Roger F. Sinta, Daniel Y. Pai
  • Patent number: 5910394
    Abstract: Negative photoimageable compositions are disclosed which contain a radiation sensitive component for producing an acid when subjected to radiation at wavelengths of 320 to 420 nanometers, a resin binder and a reactive oligomer. The compositions are useful in constructing printed circuits and integrated circuit packages.
    Type: Grant
    Filed: June 18, 1997
    Date of Patent: June 8, 1999
    Assignee: Shipley Company, L.L.C.
    Inventor: James G. Shelnut
  • Patent number: 5900346
    Abstract: The present invention relates to novel compositions that contain an activator system that comprises a photoactivator, acid generator and chain extender. Methods and articles of manufacture that comprise such compositions are also provided. In a preferred aspect, the compositions are photoimageable.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: May 4, 1999
    Assignee: Shipley Company, L.L.C.
    Inventors: Roger F. Sinta, Juan C. Scaiano, Gary S. Calabrese